A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 540-543

  Cho, Il Joo ^a   Yun, Kwang Seok ^a   Lee, Hyung kew ^a   Yoon, Jun Bo ^a   Yoon, Euisik ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ANGLE MEASUREMENT; COPPER; ELECTRIC COILS; ELECTRIC POTENTIAL; MAGNETIC FIELD EFFECTS; MIRRORS; SILICON;

BULK SILICON MIRROR PLATES; ELECTROPLATED COPPER; MICROMIRROR; TORSION BARS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036118156     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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7. Out-of plane magnetic actuators with electroplated permalloy for fluid dynamics control
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9. A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges