SOI-based fabrication processes of the scanning mirror having vertical comb fingers

Sensors and Actuators, A: Physical

Volumn 102, Issue 1-2, 2002, Pages 11-18

  Lee, Jin Ho ^a,b   Ko, Young Chul ^a   Jeong, Hee Moon ^a   Choi, Byoung So ^a   Kim, Jong Min ^a   Jeon, Duk Young ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Inductively coupled plasma reactive ion etching (ICPRIE); Laser display; Scanning mirror; Silicon on insulator (SOI); Vertical comb

Indexed keywords

INDUCTIVELY COUPLED PLASMA; MIRRORS; REACTIVE ION ETCHING; SCANNING; SILICON WAFERS; THICKNESS MEASUREMENT;

ANODIC BONDING; LASER DISPLAYS;

SILICON ON INSULATOR TECHNOLOGY;

EID: 0036897253     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00389-8     Document Type: Article

References (19)

1. M.-H. Kiang, O. Solgaard, K.Y. Lau, R.S. Muller, Electrostatic combdrive-actuated micromirrors for laser-beam scanning and positioning, J. Microelectromech. Syst. 7 (1) (1998) 27-37.
2. R.A. Conant, J.T. Nee, K.Y. Lau, R.S. Muller, A flat high-frequency scanning micromirror, in: Proceedings of the Digest of 2000 Workshop for Solid State Sensors and Actuators, Hilton Head Island, SC, USA, June 2000, pp. 6-9.
3. M.E. Motamedi, S. Park, R. Melendes, A. Wang, A.P. Andrews, D. Garcia-Nunez, D. Jinar, P.D. Richardson, J. Studer, J. Chen, J. DeNatale, J.A. Moranski, MOEM scan engine for bar-code reading and factory automation, Proc. SPIE 3276 (1998) 66-80.
4. J.-L.A. Yeh, H. Jiang, N.C. Tien, Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator, J. Microelectromech. Syst. 8 (4) (1999) 456-465.
5. H. Schenk, P. Durr, D. Kunze, H. Lakner, H. Kuck, A resonantly excited 2D-micro-scanning-mirror with large deflection, Sens. Actuators A 89 (2001) 104-111.
6. H. Toshiyoshi, W. Piyawattanametha, C.-T. Chan, M.C. Wu, Linearization of electrostatically actuated surface micromachined 2D optical scanner, J. Microelectromech. Syst. 10 (2) (2001) 205-214.
7. D.W. Wine, M.P. Helsel, L. Jenkins, H. Urey, T.D. Osborn, Performance of a biaxial MEMS-based scanner for microdisplay applications, Proc. SPIE 4178 (2000) 186-196.
8. Y.M. Hwang, J.H. Lee, Y.J. Park, J.H. Park, S.N. Cha, Y.H. Kim, 200 inches full color laser projection display, Proc. SPIE 3296 (1998) 116-125.
9. J. Lee, Y. Hwang, J. Park, Y. Park, Y. Kim, H. Lee, S. Cha, S. Hong, H. Jang, Large-area laser projection system using a white laser, in: Proceedings of the SID International Symposium Technical Digest, vol. 28, Boston, USA, 1997, pp. 631-634.
10. J. Kranert, C. Deter, T. Gessner, W. Dotzel, Laser display technology, in: Proceedings of the IEEE Micro-Electro-Mechanical Systems Workshop (MEMS'98), Heidelberg, Germany, 1998, pp. 99-104.
11. J.H. Lee, Y.C. Ko, D.H. Kong, J.M. Kim, K.B. Lee, D.Y. Jeon, Fabrication of silicon optical scanner for laser display, in: Proceedings of the 2000 IEEE/LEOS International Conference on Optical MEMS, Kauai, HI, USA, August 2000, pp. 13-14.
12. H.-M. Jeong, J.-J. Choi, K.Y. Kim, K.B. Lee, J.U. Jeon, Y.E.G. Park, Milli-scale mirror actuator with bulk micromachined vertical combs, in: Proceedings of the Transducers'99, Sendai, Japan, June 1999, pp. 1006-1009.
13. J.H. Lee, Y.C. Ko, B.S. Choi, J.M. Kim, D.Y. Jeon, Linear actuation of silicon scanning mirror for laser display, in: Proceedings of the 2001 IEEE/LEOS International Conference on Optical MEMS, Okinawa, Japan, September 2001, pp. 101-102.
14. J.H. Lee, Y.C. Ko, D.H. Kong, J.M. Kim, K.B. Lee, D.Y. Jeon, Design and fabrication of scanning mirror for laser display, Sens. Actuators A 96 (2002) 223-230.
15. J.H. Lee, Y.C. Ko, B.S. Choi, J.M. Kim, D.Y. Jeon, Bonding of silicon scanning mirror having vertical comb fingers, J. Micromech. Microeng. 12 (2002) 644-649.
16. Z. Li, Y. Hao, D. Zhang, T. Li, G. Wu, An SOI-MEMS technology using substrate layer and bonded glass as wafer-level package, Sens. Actuators A 96 (2002) 34-42.
17. W. Noell, P.-A. Clerc, L. Dellmann, B. Guldimann, H.-P. Herzig, O. Manzardo, C.R. Marxer, K.J. Weible, R. Dandliker, N. Rooij, Applications of SOI-based optical MEMS, IEEE J. Sel. Top. Quantum Electron 8 (1) (2002) 148-154.
18. K.E. Petersen, Silicon as a mechanical material, Proc. IEEE 70 (5) (1982) 420-457.
19. J. Jiao, M. Chabloz, T. Matsuura, K. Tsutsumi, Mask layout related area effect on harse process in MEMS application, in: Proceedings of the Transducers'99, Sendai, Japan, June 1999, pp. 546-549.