MEMS spatial light modulators with integrated electronics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 193-203

  Becker, Thomas ^a   Bifano, Thomas ^a   Lee, Hocheol ^a   Miller, Michele ^b   Bierden, Paul ^c   Cornelissen, Steven ^c  

^a BOSTON UNIVERSITY   (United States)

^b Michigan Technological University   (United States)

^c BOSTON MICROMACHINES CORPORATION   (United States)

Author keywords

MEMS; Micromirror; Spatial light modulator

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; INFRARED RADIATION; LIGHT MODULATION; LIGHT REFLECTION; LIGHTING; MICROMACHINING; MIRRORS;

INTEGRATED ELECTRONICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038057624     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. T.G. Bifano, J. Perreault, R. Krishnamoorthy Mali, M.N. Horenstein, Microelectromechanical Defonnable Mirrors, IEEE Journal of Selected Topics in Quantum Electronics. 5(1) (1999) 83-89.
2. Design and Fabrication of Metal MEMS Actuators for Spatial Light Modulators. M.S. Dissertation, S. Cornelissen, Boston University, 2002.
3. L.J. Hornbeck, From Cathode Rays to Digital Micromirrors: A History of Projection Display Technology, Texas Instruments Technical Journal, (15)3 p.7-46 (1998)