Monolithic III-V and hybrid polysilicon-III-V microelectromechanical tunable multilayer filters and vertical cavity surface emitting lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5116 II, Issue , 2003, Pages 465-472

  Ochoa, E M ^a   Lott, J A ^a   Nelson Jr , T R ^b   Harvey, M C ^b   Raley, J A ^a   Stintz, A ^c   Malloy, K J ^c  

^a AIR FORCE INSTITUTE OF TECHNOLOGY   (United States)

^b AIR FORCE RESEARCH LABORATORY   (United States)

^c UNIVERSITY OF NEW MEXICO   (United States)

Author keywords

Microcavity lasers; Microelectromechanical systems (MEMS); Tunable lasers; Tunable optical filters; Vertical cavity surface emitting lasers (VCSELs)

Indexed keywords

ELECTROSTATICS; FIBER BRAGG GRATINGS; MIRRORS; MONOLITHIC INTEGRATED CIRCUITS; OPTICAL FILTERS; POLYSILICON; SEMICONDUCTOR LASERS; SUBSTRATES; THIN FILMS;

DISTRIBUTED BRAGG REFLECTOR; MICROCAVITY LASERS; TUNABLE WAVELENGTH FILTERS; VERTICAL CAVITY SURFACE EMITTING LASERS;

MICROELECTROMECHANICAL DEVICES;

EID: 0041828513     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499674     Document Type: Conference Paper

References (9)

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