MEMS spatial light modulators with integrated electronics

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4561, Issue , 2001, Pages 28-34

  Cornelissen, Steven ^a   Bifano, Thomas ^a   Bierden, Paul ^b  

^a BOSTON UNIVERSITY   (United States)

^b BOSTON MICROMACHINES CORPORATION   (United States)

Author keywords

MEMS; Micromirror; Spatial light modulator

Indexed keywords

CMOS INTEGRATED CIRCUITS; LIGHT MODULATION; LIGHT REFLECTION; MICROMACHINING; MIRRORS; OPTICAL CORRELATION;

INTEGRATED ELECTRONICS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763779     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443099     Document Type: Article

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