Design and fabrication of a continuous membrane deformable mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 259-270

  Hammer, Jay A ^a   Banish, Michele R ^a   Whitley, Michael R ^a   Hao, Zhili ^a   Warren, Keith O ^b   Sanchez, Sharon ^a   Harchanko, John ^a  

^a MEMS Optical Incorporated   (United States)

^b NONE   (United States)

Author keywords

Adaptive optics; Deformable mirror; Membrane; Vertical comb drive

Indexed keywords

ADAPTIVE OPTICS; MEDICAL IMAGING; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; OPTICAL SYSTEMS; OPTICAL TELESCOPES; SILICON NITRIDE;

DEFORMABLE MIRRORS;

MIRRORS;

EID: 0038733972     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472730     Document Type: Conference Paper

References (6)

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