Off-axis variable focus and aberration control mirrors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 296-303

  Himmer, Phillip A ^a   Dickensheets, David L ^a  

^a Idaho National Laboratory   (United States)

Author keywords

Deformable mirror; Elliptical; MEMS; Micro optics; MOEMS; Off axis; Variable focus

Indexed keywords

ABERRATIONS; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROOPTICS; SILICON NITRIDE;

DEFORMABLE MIRRORS;

MIRRORS;

EID: 0037719874     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477815     Document Type: Conference Paper

References (3)

1. Phillip Himmer, David Dickensheets, "Micromachined silicon nitride deformable mirrors for focus control", Optics Letters, Vol. 26, No. 16, August 15, 2001
2. Phillip Himmer, David Dickensheets, "High speed, large deflection deformable mirrors for focus and spherical aberration control",IEEE/LEOS Optical MEMS, Lugano Switzerland, 2002.
3. rd edition, 1970 McGraw-Hill