Realization of a spectrometer with micromachined scanning grating

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4945, Issue , 2002, Pages 46-53

  Gruger H ^a   Wolter, A ^a   Schuster, T ^a   Schenk, H ^a   Lakner, H ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

MEMS; Micro scanning mirror; Micro spectrometer; MOEMS; Resonant; Scanner; Scanning grating; Spectrometer; Spectroscopy

Indexed keywords

DIFFRACTION GRATINGS; LIGHT; MASKS; MIRRORS; MONOCHROMATORS; SPECTROMETERS; SPECTROSCOPY;

MICRO SCANNING MIRROR; MICRO-OPTO-ELECTRO-MECHANICAL SYSTEM; MICROMACHINED SCANNING GRATING;

MICROELECTROMECHANICAL DEVICES;

EID: 0042563277     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.471993     Document Type: Conference Paper

References (3)

1. H. Schenk, P. Dürr, H. Kück, "A novel electrostatically driven torsional actuator for periodic deflection of light", Proc. 3rd International Conference on Micro Opto Electro Mechanical Systems, August 31 - September 01, Mainz, p. 3-10 (1999).
2. Anne P. Thorne, Spectrophysics, 2nd edition, Chapman and Hall, London, New York, 1988
3. H. Schenk, P. Dürr, Th. Haase, D. Kunze, U. Sobe, H. Lakner, H. Kück, "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5, p.715-722 (2000).