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Volumn 5348, Issue , 2004, Pages 22-31

Low cost projection device with a 2-dimensional resonant micro scanning mirror

Author keywords

Display; Image projection; MEMS; Micro scanning mirror; MOEMS; Resonant scanner

Indexed keywords

ACTUATORS; FREQUENCIES; LASER BEAMS; LIGHT MODULATION; MIRRORS; OPTICAL RESOLVING POWER; RESONANCE; SCANNING;

EID: 2142726008     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530860     Document Type: Conference Paper
Times cited : (25)

References (7)
  • 2
    • 85122657205 scopus 로고    scopus 로고
    • A new driving principle for micromechanical torsional actuators
    • MEMS, Conf.: 1999 Int. Mech. Eng. Congr. & Exh., Nov. 14-19, Nashville
    • H. Schenk, P. Dürr, D. Kunze, H. Kück, A new driving principle for micromechanical torsional actuators, Micro-Electro-Mechanical Systems, MEMS-Vol.1, Conf.: 1999 Int. Mech. Eng. Congr. & Exh., Nov. 14-19, Nashville, p 333-338, 1999
    • (1999) Micro-electro-mechanical Systems , vol.1 , pp. 333-338
    • Schenk, H.1    Dürr, P.2    Kunze, D.3    Kück, H.4
  • 4
    • 0035766305 scopus 로고    scopus 로고
    • Design optimization of an electrostatically driven Micro Scanning Mirror
    • Conf. Micromachining and Microfabrication, San Francisco
    • H. Schenk, A. Wolter, H. Lakner, Design optimization of an electrostatically driven Micro Scanning Mirror, Conf. Micromachining and Microfabrication, San Francisco, Proc. of SPIE Vol. 4561, p. 35-44, 2001
    • (2001) Proc. of SPIE , vol.4561 , pp. 35-44
    • Schenk, H.1    Wolter, A.2    Lakner, H.3
  • 5
    • 0038395948 scopus 로고    scopus 로고
    • Improved Layout for a resonant 2D Micro Scanning Mirror with low operation voltages
    • Conf. Micromachining and Microfabrication, San Jose
    • A. Wolter, H. Schenk, E. Gaumont, H. Lakner, Improved Layout for a resonant 2D Micro Scanning Mirror with low operation voltages, Conf. Micromachining and Microfabrication, San Jose, Proc. of SPIE Vol. 4985, p. 72-82, 2003
    • (2003) Proc. of SPIE , vol.4985 , pp. 72-82
    • Wolter, A.1    Schenk, H.2    Gaumont, E.3    Lakner, H.4
  • 6
    • 0037655113 scopus 로고    scopus 로고
    • Image Quality Considerations in Bi-Sinusoidally Scanned Retinal Scanning Display Systems
    • Society for Information Display International Symposium, paper #50.3
    • M. Brown, M. Freeman, C. Zobkiw, J. Lewis, Image Quality Considerations in Bi-Sinusoidally Scanned Retinal Scanning Display Systems, Society for Information Display International Symposium, SID Conference Digest Vol. XXXIII, paper #50.3, p. 1320-1323, 2002
    • (2002) SID Conference Digest , vol.33 , pp. 1320-1323
    • Brown, M.1    Freeman, M.2    Zobkiw, C.3    Lewis, J.4
  • 7
    • 0037936857 scopus 로고    scopus 로고
    • Miniature high-fidelity displays using a biaxial MEMS scanning mirror
    • Conf. Micromachining and Microfabrication, San Jose
    • M. O. Freeman, Miniature high-fidelity displays using a biaxial MEMS scanning mirror, Conf. Micromachining and Microfabrication, San Jose, Proc. of SPIE Vol. 4985, p. 56-62, 2003
    • (2003) Proc. of SPIE , vol.4985 , pp. 56-62
    • Freeman, M.O.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.