A micromachined deformable mirror for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 230-241

  Schwartz, Wilfrid ^a,b,c   Divoux, Claire ^a   Margail, Jacques ^a   Jocou, Laurent ^c   Charton, Julien ^c   Stadler, Eric ^c   Jager, Thomas ^a   Casset, Fabrice ^a   Enot, T ^a  

^a CEA GRENOBLE   (France)

^b CILAS Co Industrielle des Lasers ^*  (France)

^c Domaine Universitaire   (France)

Author keywords

Adaptive Optics; Deformable mirror; Electrostatic actuator; MEMS; MOEMS

Indexed keywords

ACTUATORS; ASTRONOMY; ELECTROSTATICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; SILICON;

DEFORMABLE MIRRORS;

ADAPTIVE OPTICS;

EID: 0038395941     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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4. th international Conference on Solid-State Sensors and Actuators, Munich, June 2001.
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6. th International Conference on Solid-State Sensors and Actuators, June 1995, 430-433, 1995.
7. O. Cugat et al., "Deformable magnetic mirror for adaptive optics: technological aspects", Sensors and Actuators A89, 9, 2001.
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