Design and fabrication of microlens and spatial filter array by self-alignment

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 26-36

  Yang, Ren ^a   Chan, Kin Foong ^a   Feng, Zhiqiang ^a   Mei, Wenhui ^a  

^a Ball Semiconductor Inc   (United States)

Author keywords

Digital Mirror Device (DMD); Maskless lithography system (MLS); MOEMS; Pattern generator

Indexed keywords

ALIGNMENT; ARRAYS; CHIP SCALE PACKAGES; FABRICATION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; OPTICAL DESIGN; OPTICAL FILTERS; PRINTED CIRCUIT BOARDS; SPURIOUS SIGNAL NOISE; ULTRAVIOLET RADIATION;

PATTERN GENERATORS;

MICROLENSES;

EID: 0038734039     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472865     Document Type: Conference Paper

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