A single two-axis micromachined tilt mirror and linear array

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 83-94

  Whitley, Michael ^a   Hammer, Jay ^a   Hao, Zhili ^a   Wingfield, Brian ^a   Nelson, Luis ^a  

^a MEMS Optical Incorporated   (United States)

Author keywords

MEMS packaging; Mirror array; Scanning; Tilt mirror; Torsion hinge

Indexed keywords

ARRAYS; ELECTRONICS PACKAGING; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SCANNING;

TILT MIRRORS;

MIRRORS;

EID: 0037719905     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472858     Document Type: Conference Paper

References (5)

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3. "Modeling Air Damping Effect in a Bulk Micromachined 2D Tilt Mirror," Hao, Z., Clark, R., Hammer, J.A., Whitley, M., Wingfield, B., accepted for Sensors and Actuators A, paper S-365e, 2002.
4. Langlois, W. E. "Isothermal Squeeze Films," Quarterly Applied Mathematics, 1962, pp. 131-150.
5. Mehner, J. and Kurth, S. "Simulation of Gas Damping in Microstructures with Nontrivial Geometries," IEEE MEMS '98 Conf. 1998, pp. 172-177.