Conformal grating electromechanical system (GEMS) for high-speed digital light modulation

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2002, Pages 568-573

  Kowarz, Marek W ^a   Brazas Jr , John C ^a   Phalen, James G ^a  

^a EASTMAN KODAK COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; ELECTROSTATIC ACTUATORS; IMAGING SYSTEMS; LIGHT MODULATION; OPTICAL SWITCHES; PULSE WIDTH MODULATION; SEMICONDUCTING SILICON; SUBSTRATES;

DIGITAL IMAGING SYSTEMS; ELECTROMECHANICAL RIBBONS; GRATING ELECTROMECHANICAL SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0036118175     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. The Ruticon family of erasable image recording devices
2. Metallized viscoelastic control layers for light-valve projection displays
3. Deformable grating optical modulator
4. Optical performance of the grating light valve technology
5. Spatial light modulator with conformal grating device
6. M-test: A test chip for MEMS material property measurement using electrostatically actuated test structures
7. Method and system for actuating electro-mechanical ribbon elements in accordance to a data stream