Interferometric modulation: MOEMS as an enabling technology for high-performance reflective displays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 131-139

  Miles, Mark W ^a  

^a Iridigm Display Corp   (United States)

Author keywords

Flat panel display; Interference; MOEMS; Reflective display; Thin films

Indexed keywords

DISPLAY DEVICES; MICROELECTROMECHANICAL DEVICES; MODULATION; MODULATORS; THIN FILMS;

INTERFEROMETRIC MODULATION;

INTERFEROMETRY;

EID: 0037719902     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.477813     Document Type: Conference Paper

References (10)

1. J. B. Sampsell "An Overview of the Digital Micromirror Device (DMD) and its Application to Projection Displays", SID 93 Digest, pp. 1012.
2. O. Solgaard, F.S.A. Sandejas, and D.M. Bloom, "Deformable Grating Optical Modulator", Optics Letters, Vol. 17, No. 9, pp. 688-690, 1992.
3. A. Sugahara, R. Lang, et al., "Reflective Electromechanically Actuated Film Display (AFD) for Direct Viewing," SID '99 Digest, Session 53.5.
4. J. Jerman, "A Miniature Fabry-Perot Interferometer Fabricated Using Silicon Micromachining Techniques", Digest IEEE Solid State-Sensors Workshop, '88
5. K. Aratani, P. French, et al., "Process and Design Considerations for Surface Micromachined Beams for a Tuneable Interferometer Array in Silicon", Proc. IEEE Micro Electro Mechanical Systems, '93, pp. 230-235.
6. E. Vail, M. Wu, et al., "GaAs Micromachined Widely Tunable Fabry-Perot Filters, Electron. Lett. '95, Vol. 31, No. 3, '95, pp. 228-229
7. M. Larson, B. Pezeshki, et al., "Vertical Coupled-Cavity Microinterferometer on GaAs with Deformable-Membrane Top Mirror", IEEE Photonics Technology Letters, '95, Vol. 7, No. 4, pp. 382-384.
8. M. Miles, "A New Reflective FPD Technology Using Interferometric Modulation," SID '97 Digest, Session 7.3.
9. M. Miles, "Digital Paper™: Reflective Displays Using Interferometric Modulation," SID '00 Digest, Session 5.3.
10. K. Gossen, J. Walker, et al., "Silicon Modulator Based on Mechanically-Active Anti-Reflection Layer with 1 Mbit/sec Capability for Fiber-in-the-Loop Applications," IEEE '94 Photonic Technology Letters.