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Volumn 5346, Issue , 2004, Pages 193-202

Bulk micro machined quasistatic torsional micro mirror

Author keywords

MEMS; Optical cross connect; Quasistatic torsional micro mirror; Scanning mirror

Indexed keywords

CAPACITANCE; DEFORMATION; ELECTRIC POTENTIAL; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SCANNING; SILICON; SILICON WAFERS;

EID: 2142719737     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530717     Document Type: Conference Paper
Times cited : (3)

References (12)
  • 1
    • 0019063742 scopus 로고
    • Silicon Torsional Scanning Mirror
    • K.E.Peterson; "Silicon Torsional Scanning Mirror" IBM J. Res. Develop. Vol.24 No.5 (1980) pp.631-637
    • (1980) IBM J. Res. Develop. , vol.24 , Issue.5 , pp. 631-637
    • Peterson, K.E.1
  • 4
    • 0001124243 scopus 로고    scopus 로고
    • Lucent Microstar™ Micromirror Array Technology for Large Optical Crossconnects
    • V.A.Aksyuk, F. Pardo, C.A. Bolle, S.Arney, C.R.Giles, D.J.Bishop; "Lucent Microstar™ Micromirror Array Technology for Large Optical Crossconnects" Proc. SPIE 4178 pp.320-324 (2000)
    • (2000) Proc. SPIE , vol.4178 , pp. 320-324
    • Aksyuk, V.A.1    Pardo, F.2    Bolle, C.A.3    Arney, S.4    Giles, C.R.5    Bishop, D.J.6
  • 8
    • 0031703912 scopus 로고    scopus 로고
    • Simulation of Gas Damping in Microstructures with nontrivial Geometries
    • Heidelberg, Germany
    • J.Mehner, S.Kurth, D.Billep, C.Kaufmann, K.Kehr, and W.Dötzel; "Simulation of Gas Damping in Microstructures with nontrivial Geometries" Proc. MEMS '98, Heidelberg, Germany, 1998, pp. 172-177
    • (1998) Proc. MEMS '98 , pp. 172-177
    • Mehner, J.1    Kurth, S.2    Billep, D.3    Kaufmann, C.4    Kehr, K.5    Dötzel, W.6
  • 10
    • 0035980427 scopus 로고    scopus 로고
    • The influence of atomic configuration of (hkl) planes and adsorption processes associated with anisotropic etching of silicon
    • Irena Zubel; "The influence of atomic configuration of (hkl) planes and adsorption processes associated with anisotropic etching of silicon" Sensors and Actuators A 94 (2001) pp.76-86
    • (2001) Sensors and Actuators A , vol.94 , pp. 76-86
    • Zubel, I.1
  • 12
    • 0033334458 scopus 로고    scopus 로고
    • Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators
    • Santa Clara (CA), USA, September 20-21, SPIE
    • V. Laible, Paul M. Hagelin, Olav Solgard, and Ernst Obermeier "Static and Dynamic Characterization of Polysilicon Surface-Micromachined Actuators" SPIE - Micromachined Devices and Components V, Santa Clara (CA), USA, September 20-21, 1999 SPIE, Vol. 3876, pp. 162-170.
    • (1999) SPIE - Micromachined Devices and Components V , vol.3876 , pp. 162-170
    • Laible, V.1    Hagelin, P.M.2    Solgard, O.3    Obermeier, E.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.