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Volumn 4985, Issue , 2003, Pages 95-105

MEMS electromagnetic optical scanner for a commercial laser scanning microscope

(1)  Myajima, Hiroshi a  

a NONE

Author keywords

Closed loop control; Electromagnetic; Hinge; Laser scanning microscope; Optical scanner; Reliability

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NATURAL FREQUENCIES;

EID: 0037719931     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478564     Document Type: Conference Paper
Times cited : (4)

References (14)
  • 5
    • 0033311036 scopus 로고    scopus 로고
    • Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope
    • September
    • U. Hofmann, S. Muehlmann, M. Witt, K. Dorschel, R. Schutz, and B. Wagner, "Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope," Proc. of SPIE, vol. 3878, pp. 29-38, September 1999.
    • (1999) Proc. of SPIE , vol.3878 , pp. 29-38
    • Hofmann, U.1    Muehlmann, S.2    Witt, M.3    Dorschel, K.4    Schutz, R.5    Wagner, B.6
  • 9
    • 0030718114 scopus 로고    scopus 로고
    • Monolithic fabrication of flexible film and thinned integrated circuits
    • Nagoya, Japan, Jan.
    • S. Kaneko, N. Asaoka, H. Tosaka, R. Ohta, and K. Yanagisawa, "Monolithic fabrication of flexible film and thinned integrated circuits", Proc. MEMS-97, Nagoya, Japan, pp. 471-476, Jan., 1997.
    • (1997) Proc. MEMS-97 , pp. 471-476
    • Kaneko, S.1    Asaoka, N.2    Tosaka, H.3    Ohta, R.4    Yanagisawa, K.5
  • 10
    • 0001272349 scopus 로고    scopus 로고
    • Micromachined electromagnetic scanning mirrors
    • May
    • R. A. Miller, and Y.-C. Tai, "Micromachined electromagnetic scanning mirrors" Optical Engineering, Vol. 36, No. 5, pp. 1399-1407, May 1997.
    • (1997) Optical Engineering , vol.36 , Issue.5 , pp. 1399-1407
    • Miller, R.A.1    Tai, Y.-C.2
  • 12
    • 85088394546 scopus 로고    scopus 로고
    • Performance of a biaxial MEMS-based scanner for microdisplay applications
    • Aug.
    • D. W. Wine, M. P. Helsel, L. Jenkins, E. Urey, and T. D. Osbom, "Performance of a biaxial MEMS-based scanner for microdisplay applications", Proc. SPIE Vol. 4178, pp. 186-196, Aug. 2000.
    • (2000) Proc. SPIE , vol.4178 , pp. 186-196
    • Wine, D.W.1    Helsel, M.P.2    Jenkins, L.3    Urey, E.4    Osbom, T.D.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.