MEMS electromagnetic optical scanner for a commercial laser scanning microscope

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 95-105

  Myajima, Hiroshi ^a  

^a NONE

Author keywords

Closed loop control; Electromagnetic; Hinge; Laser scanning microscope; Optical scanner; Reliability

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; LASER BEAM EFFECTS; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; NATURAL FREQUENCIES;

OPTICAL SCANNERS;

SCANNING;

EID: 0037719931     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478564     Document Type: Conference Paper

References (14)

1. T. Wilson, Ed., "Confocal Microscopy", Academic Press, 1990.
2. H. Miyajima, N. Asaoka, M. Arima, Y. Minamoto, K. Murakami, K. Tokuda, and K. Matsumoto, "An electromagnetic optical scanner with polyimide-based hinges", Tech. Digest, Transducers '99, Sendai, Japan, pp. 372-375, June, 1999.
3. H. Miyajima, N. Asaoka, M. Arima, Y. Minamoto, K. Murakami, K. Toduda, and K. Matsumoto, "A durable, shock-resistant electromagnetic optical scanner with polyimide-based hinges", IEEE Journal of Microelectromechanical System, Vol.10, No.3, pp.418-424, 2001.
4. D. L. Dickensheets, and G. S. Kino, "Silicon-micromachined scanning confocal optical microscope," IEEE Journal of Microelectromechanical Systems, vol. 7, No.1, pp. 38-47, March 1998.
5. U. Hofmann, S. Muehlmann, M. Witt, K. Dorschel, R. Schutz, and B. Wagner, "Electrostatically driven micromirrors for a miniaturized confocal laser scanning microscope," Proc. of SPIE, vol. 3878, pp. 29-38, September 1999.
6. W. Piyawattanametha, P. R. Patterson, G. D. J. Su, H. Toshiyoshi, and M. C. Wu, "A MEMS Non-interferometic Differential Confocal Scanning Optical Microscope", Tech. Digest, Transducers '01, Munich, Germany, pp. 590-593, June, 2001.
7. N. Asada, M. Takeuchi, V. Vaganov, N. Belov, S, Hout, and I. Sluchak, "Silicon micro-optical scanner", Tech. Digest, Transducers '99, Sendai, Japan, pp. 778-781, June, 1999.
8. H. Miyajima, N. Asaoka, T. Isokawa, M. Ogata, Y. Aoki, M. Imai, O. Fujimori, M. Katashiro, and K. Matsumoto, "Product Development of a MEMS Optical Scanner for a Laser Scanning Microscope", Proc. MEMS-2002, Las Vagas, NV, USA, pp. 552-555, Jan., 2002.
9. S. Kaneko, N. Asaoka, H. Tosaka, R. Ohta, and K. Yanagisawa, "Monolithic fabrication of flexible film and thinned integrated circuits", Proc. MEMS-97, Nagoya, Japan, pp. 471-476, Jan., 1997.
10. R. A. Miller, and Y.-C. Tai, "Micromachined electromagnetic scanning mirrors" Optical Engineering, Vol. 36, No. 5, pp. 1399-1407, May 1997.
11. A. S. Dewa, J. W. Orcutt, M. Hudson, D. Krozier, A. Richards, and H. Laor, "Development of a silicon two-axis micromirror for an optical cross-connect", Tech. Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, pp. 93-96, June, 2000.
12. D. W. Wine, M. P. Helsel, L. Jenkins, E. Urey, and T. D. Osbom, "Performance of a biaxial MEMS-based scanner for microdisplay applications", Proc. SPIE Vol. 4178, pp. 186-196, Aug. 2000.
13. A. Neukermans, "Applications of MEMS switches in optical networks", Tech. Digest, 4th International Topical Workshop on Contemporary Photonic Technologies (CPT2001), Tokyo, Japan, pp. 19-22, Jan., 2001.
14. H. Miyajima, T. Arikawa, T. Hidaka, K. Tokuda, and K. Matsumoto, "A study on nonlinear torsional characteristics of polyimide hinges", Tech. Digest, Transducers '01, Munich, Germany, pp. 1402-1405, June, 2001.