Accelerometer by means of a resonant micro actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5344, Issue , 2004, Pages 124-133

  Drabe, Christian ^a   Schenk, Harald ^a   Roscher, Kai Uwe ^a   Kunze, Detlef ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR PHOTONIC MICROSYSTEMS   (Germany)

Author keywords

Accelerometer; BSOI; CMOS; Comb fingers; Interdigitating; MEMS; Resonant; Single crystal; Vacuum

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; MICROACTUATORS; MICROMACHINING; RESONANCE; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

BSOI; COMB FINGERS; RESONANT MICROACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 2142752720     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524130     Document Type: Conference Paper

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