Advanced fiber optical switches using deep RIE (DRIE) fabrication

Sensors and Actuators, A: Physical

Volumn 102, Issue 3, 2003, Pages 286-295

  Li, J ^a   Zhang, Q X ^b   Liu, A Q ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

DRIE; Fiber optical communication; MEMS; Optical switch; OXCs

Indexed keywords

ACTUATORS; DENSE WAVELENGTH DIVISION MULTIPLEXING; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL INTERCONNECTS; REACTIVE ION ETCHING;

ADVANCED FIBER OPTICAL SWITCHES; MICROMIRROR; OPTICAL CROSSCONNECTS; VARIABLE OPTICAL ATTENUATOR;

OPTICAL SWITCHES;

EID: 0037241722     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00401-6     Document Type: Article

References (14)

1. A.Q. Liu, X.M. Zhang, V.M. Murukeshan, Q.X. Zhang, Q.B. Zou, S. Uppili, Optical switch using draw-bridge micromirror for large array crossconnects, in: Proceedings of the 11th International Conference on Solid-State Sensors and Actuators, Transducer'01 Eurosensors XV, Munich, Germany, 10-14 June 2001, pp. 1324-1327.
2. S. Georgis, DWDM Switching with Network Photonics Cross-Wave™ Technology, in: Proceedings of the SPIE on the Third Generation Optical Switching Technology, Optical Switching and Optical Interconnection, APOC 2001, vol. 4582, Beijing, China, 2001, pp. 1-6.
3. M. Cornel, T. Christian, M.A. Gretillat, N.F. deRooij, R. Battig, A. Oliver, B. Valk, V. Paul, Vertical mirrors fabricated by deep reactive ion etching for fiber-optic switching applications, J. Microelectromech. Systems 6 (3) (1997) 277-285.
4. H. Martin, K. Peter, E. Voges. Lensless latching-type fiber switches using silicon micromachined actuators, Opt. Fiber Commun. Conf. 13 (2000) 250-252.
5. H. Toshiyoshi, H. Fujita, Electrostatic micro torsion mirrors for an optical switch matrix, J. Microelectromech. Systems 5 (4) (1996) 231-237.
6. W.H. Juan, S.W. Pang, Released Si microstructures fabricated by deep etching and shallow diffusion, J. Microelectromech. Systems 5 (1) (1996) 18-23.
7. A.K. Ghatak, K. Thyagarajan, Optical Electronics, Cambridge University Press, UK, 1989, pp. 410-411.
8. T. Markimoto, Analysis of splice loss in single-mode fibers using a Gaussian field approximation, Opt. Quantum Electron. 11 (1979) 447-457.
9. A.Q. Liu, X.M. Zhang, V.M. Murukeshan, Q.X. Zhang, Q.B. Zou, S. Uppili, An optical crossconnect (OXC) using drawbridge micromirrors, Sens. Actuators 97 (1, Feb) (2002) 78-87.
10. S. Martinez, in: Proceedings of the SPIE on the Insertion Loss in Micromachine Free-Space Optical Cross-Connects Due to Fiber Misalignments, DTIP 2001f, vol. 4408, France, 2001, pp. 289-300.
11. P. Beckmann, A. Spizzichino, The Scattering of Electromagnetic Waves from Rough Surfaces, Artech House, Norwood, MA, 1987, Chapters 3-5.
12. U. Sridhar, C.H. Lau, Y.B. Miao, K.S. Tan, P.D. Foo, L.J. Liu, in: Proceedings of the Transducer'99 on the Single Crystal Silicon Microstructures Using Trench Isolation, 7-10 June 1999, Japan, pp. 258-261.
13. E.D. Palik, Handbook of Optical Constants of Solid, Academic Press, Orlando, 1985, pp. 374-375.
14. http://www.sercalo.com/p_switch1x2.htm.