Improved layout for a resonant 2D Micro Scanning Mirror with low operation voltages

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 72-82

  Wolter, Alexander ^a   Schenk, Harald ^a   Gaumont, Eric ^a   Lakner, Hubert ^a  

^a FRAUNHOFER INSTITUTE FOR MICROELECTRONIC CIRCUITS AND SYSTEMS   (Germany)

Author keywords

2 dimensional scanner; Beam deflection; Bulk micromachining; Comb drive; Comb electrode; MEMS; Micro scanning mirror; Micromechanical actuator; MOEMS; Resonant scanner

Indexed keywords

CAPACITANCE; DAMPING; ELECTRIC INSULATING MATERIALS; ELECTRIC POTENTIAL; ELECTRODES; MICROMACHINING; MIRRORS; SCANNING; SILICON ON INSULATOR TECHNOLOGY;

SCANNING MIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038395948     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.472863     Document Type: Conference Paper

References (7)

1. H. Schenk, et al.: "Large Deflection Micromechanical Scanning Mirrors for Linear Scans and Pattern Generation", Journal of Selected Topics in Quantum Electronics, Vol. 6, No. 5, p.715-722 (2000)
2. H. Schenk, et al.: "Design and modeling of large deflection micromechanical ID and 2D scanning mirrors", SPIE Proc. 4178, 18-19 Sept. 2000, Santa Clara, Calif., p.116-125
3. Schenk et al., "Design optimization of an electrostatically driven Micro Scanning Mirror", Proc. SPIE 4561, Oct 2002, San Jose, Calif., p. 35-44, 2001
4. Gaumont, E. et al.: "Mechanical and electrical failures and reliability of micro scanning mirrors", International Symposium on the Physical & Failure Analysis of Integrated Circuits 2002. 8-12 July 2002, Proceedings, Singapore, IEEE Press, New York, 2002, S.212-217
5. Grüger et al.: "Realization of a spectrometer with micromachined scanning grating", Photonics Fabrication Europe, Brügge, Belgium, SPIE vol. 4945A-6, Nov 2002
6. European Patent EP 1 123 526 B1
7. D. Weiss et al.: "An Integrated Cavity Wafer Level Chip Size Package for MEMS Applications, Conf.: Micromachining and Microfabrication, San Francisco, Proc. of SPIE Vol. 4557, p. 183-191 (2001)