Plasma-assisted InP-to-Si low temperature wafer bonding

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 118-131

  Pasquariello, Donato ^a   Hjort, Klas ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Indium; Phosphorous alloys; Plasma; Silicon; Wafer bonding

Indexed keywords

ANNEALING; BONDING; INTEGRATED OPTOELECTRONICS; LOW TEMPERATURE EFFECTS; OPTICAL FIBERS; PLASMA APPLICATIONS; SEMICONDUCTING INDIUM PHOSPHIDE;

WAFER BONDING;

SILICON WAFERS;

EID: 0036248656     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991407     Document Type: Article

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