Wafer fusion: Materials issues and device results

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 3, Issue 3, 1997, Pages 943-951

  Black, A ^a   Hawkins, A R ^a   Margalit, N M ^a   Babic D I ^a   Holmes Jr , A L ^a   Chang, Y L ^a   Abraham, P ^a   Bowers, J E ^a   Hu, E L ^a  

^a University of California   (United States)

Author keywords

Detectors; Optical fiber communication; Semiconductor device bonding; Semiconductor device fabrication; Semiconductor heterojunctions; Semiconductor lasers

Indexed keywords

BONDING; HETEROJUNCTIONS; INTERFACES (MATERIALS); LATTICE CONSTANTS; OPTICAL COMMUNICATION; OPTICAL FIBERS; PHOTODETECTORS; SEMICONDUCTOR LASERS;

WAFER FUSION;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031153807     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.640648     Document Type: Article

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