Scheduling of single-arm cluster tools for an atomic layer deposition process with residency time constraints

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 47, Issue 3, 2017, Pages 502-516

  Yang, Fajun ^a   Wu, NaiQi ^a,b   Qiao, Yan ^b   Zhou, MengChu ^c,d   Li, ZhiWu ^b  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^d KING ABDULAZIZ UNIVERSITY   (Saudi Arabia)

Author keywords

Cluster tool; discrete event system; robotic system; scheduling; semiconductor manufacturing

Indexed keywords

DISCRETE EVENT SIMULATION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TOOLS;

CLUSTER TOOL; ROBOTIC SYSTEMS; SCHEDULABILITY ANALYSIS; SCHEDULABILITY CONDITIONS; SCHEDULING PROBLEM; SCHEDULING STRATEGIES; SEMICONDUCTOR MANUFACTURING; WAFER FABRICATIONS;

ATOMIC LAYER DEPOSITION;

EID: 85014709856     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2015.2507140     Document Type: Article

References (60)

1. N. Brauner, "Identical part production in cyclic robotic cells: Concepts, overview, and open questions," Discret. Appl. Math., vol. 156, no. 13, pp. 2480-2492, 2008
2. W. K. V. Chan, J. G. Yi, and S. W. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011
3. W. K. V. Chan, J. G. Yi, S. W. Ding, and D. Z. Song, "Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 17-28, Jan. 2011
4. A. Che, J. Feng, H. Chen, and C. Chu, "Robust optimization for the cyclic hoist scheduling problem," Eur. J. Oper. Res., vol. 240, no. 3, pp. 627-636, Feb. 2015
5. Y. Crama, V. Kats, J. Van De Klundert, and E. Levner, "Cyclic scheduling in robotic flowshops," Ann. Oper. Res.: Math. Ind. Syst., vol. 96, nos. 1-4, pp. 97-124, 2000
6. Y. Crama, and J. Van De Klundert, "Cyclic scheduling of identical parts in a robotic cell," Oper. Res., vol. 45, no. 6, pp. 952-965, 1997
7. M. Dawande, H. N. Geismar, M. Pinedo, and C. Sriskandarajah, "Throughput optimization in dual-gripper interval robotic cells," IIE Trans., vol. 42, no. 1, pp. 1-15, Jan. 2010
8. M. W. Dawande, H. N. Geismar, S. P. Sethi, and C. Sriskandarajah, Throughput Optimization in Robotic Cells. New York, NY, USA: Springer, 2007
9. M. Dawande, C. Sriskandarajah, and C. S. Sethi, "On throughput maximization in constant travel-time robotic cells," Manuf. Service Oper. Manag., vol. 4, no. 4, pp. 296-312, 2002
10. H. N. Geismar, L. M. A. Chan, M. Dawande, and C. Sriskandarajah, "Approximations to optimal k-unit cycles for single-and dual-gripper robotic cells," Prod. Oper. Manag., vol. 17, no. 5, pp. 551-563, 2008
11. H. N. Geismar, M. Dawande, and C. Sriskandarajah, "Throughput optimization in constant travel-time dual gripper robotic cells with parallel machines," Prod. Oper. Manag., vol. 15, no. 2, pp. 311-328, 2006
12. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of time-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 16, no. 3, pp. 521-534, Aug. 2003
13. J.-H. Kim, and M. C. Zhou, "Schedule restoration for single-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 27, no. 3, pp. 388-399, Aug. 2014
14. H.-J. Kim, J.-H. Lee, and T.-E. Lee, "Noncyclic scheduling of cluster tools with a branch, and bound algorithm," IEEE Trans. Autom. Sci. Eng., vol. 12, no. 2, pp. 690-700, Apr. 2015
15. H.-J. Kim, J.-H. Lee, C. Y. Jung, and T.-E. Lee, "Scheduling cluster tools with ready time constraints for consecutive small lots," IEEE Trans. Autom. Sci. Eng., vol. 10, no. 1, pp. 145-159, Jan. 2013
16. J.-H. Lee, H.-J. Kim, and T.-E. Lee, "Scheduling lot switching operations for cluster tools," IEEE Trans. Semicond. Manuf., vol. 26, no. 4, pp. 592-601, Nov. 2013
17. T.-E. Lee, and S.-H. Park, "An extended event graph with negative places, and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, Oct. 2005
18. H.-Y. Lee, and T.-E. Lee, "Scheduling single-armed cluster tools with reentrant wafer flows," IEEE Trans. Semicond. Manuf., vol. 19, no. 2, pp. 226-240, May 2006
19. T.-E. Lee, H.-Y. Lee, and Y.-H. Shin, "Workload balancing, and scheduling of a single-armed cluster tool," in Proc. 5th APIEMS Conf., Gold Coast, QLD, Australia, 2004, pp. 1-15
20. M.-J. Lopez, and S.-C. Wood, "Systems of multiple cluster tools: Configuration, reliability, and performance," IEEE Trans. Semicond. Manuf., vol. 16, no. 2, pp. 170-178, May 2003
21. T. Nishi, and I. Matsumoto, "Petri net decomposition approach to deadlock-free, and non-cyclic scheduling of dual-armed cluster tools," IEEE Trans. Autom. Sci. Eng., vol. 12, no. 1, pp. 281-294, Jan. 2015
22. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers, and revisitation sequences on throughput," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 384-400, Aug. 1996
23. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 369-373, Aug. 1994
24. M. Pinedo, Scheduling: Theory, Algorithms, and Systems. Englewood Cliffs, NJ, USA: Prentice Hall, 1995
25. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Petri net modeling, and wafer sojourn time analysis of single-arm cluster tools with residency time constraints, and activity time variation," IEEE Trans. Semicond. Manuf., vol. 25, no. 3, pp. 432-446, Aug. 2012
26. Y. Qiao, N. Q. Wu, and M. C. Zhou, "A Petri net-based novel scheduling approach, and its cycle time analysis for dual-arm cluster tools with wafer revisiting," IEEE Trans. Semicond. Manuf., vol. 26, no. 1, pp. 100-110, Feb. 2013
27. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Scheduling of dual-arm cluster tools with wafer revisiting, and residency time constraints," IEEE Trans. Ind. Informat., vol. 10, no. 1, pp. 286-300, Feb. 2014
28. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Schedulability, and scheduling analysis of dual-arm cluster tools with wafer revisiting, and residency time constraints based on a novel schedule," IEEE Trans. Syst., Man, Cybern., Syst., vol. 45, no. 3, pp. 472-484, Mar. 2015
29. Y. Qiao, N. Q. Wu, C. R. Pan, and M. C. Zhou, "How to respond to process module failure in residency time-constrained single-arm cluster tools," IEEE Trans. Semicond. Manuf., vol. 27, no. 4, pp. 462-474, Nov. 2014
30. Y. Qiao, C.-R. Pan, N.-Q. Wu, and M. C. Zhou, "Response policies to process module failure in single-arm cluster tools subject to wafer residency time constraints," IEEE Trans. Autom. Sci. Eng., vol. 12, no. 3, pp. 1125-1139, Jul. 2015
31. Y. Qiao, N. Q. Wu, Q. H. Zhu, and L. P. Bai, "Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times," Comput. Oper. Res., vol. 53, pp. 252-260, Jan. 2015
32. S. P. Sechi, J. B. Sidney, and C. Sriskandarajah, "Scheduling in dual gripper robotic cells for productivity gains," IEEE Trans. Robot. Autom., vol. 17, no. 3, pp. 324-341, Jun. 2001
33. S. P. Sechi, C. Sriskandarajah, G. Sorger, J. Blazewicz, and W. Kubiak, "Sequencing of parts, and robot moves in a robotic cell," Int. J. Flexible Manuf. Syst., vol. 4, nos. 3-4, pp. 331-358, 1992
34. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steadystate throughput analysis of cluster tools: Dual-blade versus single-blade robots," IEEE Trans. Semicond. Manuf., vol. 10, no. 4, pp. 418-424, Nov. 1997
35. N. Q. Wu, "Necessary, and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern. C, Appl. Rev., vol. 29, no. 2, pp. 192-204, May 1999
36. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability, and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May 2008
37. N. Q. Wu, F. Chu, C. Chu, and M. Zhou, "Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 42-55, Jan. 2011
38. N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, "Petri net modeling, and cycle-time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern., Syst., vol. 43, no. 1, pp. 196-207, Jan. 2013
39. N. Q. Wu, and M. C. Zhou, "Avoiding deadlock, and reducing starvation, and blocking in automated manufacturing systems based on a Petri net model," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 658-669, Nov. 2001
40. N. Q. Wu, and M. C. Zhou, "Modeling, and deadlock avoidance of automated manufacturing systems with multiple automated guided vehicles," IEEE Trans. Syst., Man, Cybern. B, Cybern., vol. 35, no. 6, pp. 1193-1202, Dec. 2005
41. N. Q. Wu, and M. Zhou, "Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint, and activity time variation," IEEE Trans. Semicond. Manuf., vol. 23, no. 1, pp. 53-64, Feb. 2010
42. N. Q. Wu, and M. C. Zhou, "A closed-form solution for schedulability, and optimal scheduling of dual-arm cluster tools based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010
43. N. Q. Wu, and M. C. Zhou, "Colored timed Petri nets for modeling, and analysis of cluster tools," Asian J. Control, vol. 12, no. 3, pp. 253-266, 2010
44. N. Q. Wu, and M. C. Zhou, "Modeling, analysis, and control of dual-arm cluster tools with residency time constraint, and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012
45. N. Q. Wu, and M. C. Zhou, "Schedulability analysis, and optimal scheduling of dual-arm cluster tools with residency time constraint, and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012
46. N. Q. Wu, M. C. Zhou, F. Chu, and C. B. Chu, "A Petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern., Syst., vol. 43, no. 5, pp. 1182-1194, Sep. 2013
47. N. Q. Wu, M. C. Zhou, and Z. W. Li, "Resource-oriented Petri net for deadlock avoidance in flexible assembly systems," IEEE Trans. Syst., Man, Cybern. A, Syst., Humans, vol. 38, no. 1, pp. 56-69, Jan. 2008
48. N. Q. Wu, M. C. Zhou, and Z. W. Li, "Short-term scheduling of crudeoil operations: Enhancement of crude-oil operations scheduling using a Petri net-based control-theoretic approach," IEEE Robot. Autom. Mag., vol. 22, no. 2, pp. 64-76, Jun. 2015
49. H. J. Yoon, and D. Y. Lee, "Online scheduling of integrated single-wafer processing tools with temporal constraints," IEEE Trans. Semicond. Manuf., vol. 18, no. 3, pp. 390-398, Aug. 2005
50. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 26, no. 4, pp. 578-591, Nov. 2013
51. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Scheduling of single-arm multi-cluster tools with wafer residency time constraints in semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 28, no. 1, pp. 117-125, Feb. 2015
52. W. M. Zuberek, "Timed Petri nets in modeling, and analysis of cluster tools," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 562-575, Oct. 2001
53. W. M. Zuberek, "Cluster tools with chamber revisiting-Modeling, and analysis using timed Petri nets," IEEE Trans. Semicond. Manuf., vol. 17, no. 3, pp. 333-344, Aug. 2004
54. N. Q. Wu, and M. C. Zhou, System Modeling, and Control With Resource-Oriented Petri Nets. New York, NY, USA: Taylor & Francis, Oct. 2009
55. J. C. Luo, K. Y. Xing, M. C. Zhou, X. L. Li, and X. N. Wang, "Deadlockfree scheduling of automated manufacturing systems using Petri nets, and hybrid heuristic search," IEEE Trans. Syst., Man, Cybern., Syst., vol. 45, no. 3, pp. 530-541, Mar. 2015
56. F. Qiao, and M. C. Zhou, "Scheduling of semiconductor manufacturing systems using Petri nets," in Formal Methods in Manufacturing, J. Campos, C. Seatzu, and X. Xie, Eds. New York, NY, USA: Taylor, and Francis, 2013, pp. 553-569
57. N. Q. Wu, M. C. Zhou, F. Chu, and S. Mammar, "Modeling, analysis, scheduling, and control of cluster tools in semiconductor fabrication," in Contemporary Issues in Systems Science, and Engineering, M. C. Zhou, H.-X. Li, and M. P. C. Weijnen, Eds. Hoboken, NJ, USA: Wiley, 2015, pp. 289-315
58. N. Q. Wu, and M. C. Zhou, "Deadlock-free scheduling for semiconductor track systems based on resource oriented Petri nets," OR Spectr., vol. 29, no. 3, pp. 421U 443, Jul. 2007
59. K. Xing, L. Han, M. C. Zhou, and F. Wang, "Deadlock-free genetic scheduling algorithm for automated manufacturing systems based on deadlock control policy," IEEE Trans. Syst., Man, Cybern. B, Cybern., vol. 42, no. 3, pp. 603-615, Jun. 2012
60. H. H. Xiong, and M. C. Zhou, "Scheduling of semiconductor test facility via Petri nets, and hybrid heuristic search," IEEE Trans. Semicond. Manuf., vol. 11, no. 3, pp. 384-393, Aug. 1998