Schedule restoration for single-armed cluster tools

IEEE Transactions on Semiconductor Manufacturing

Volumn 27, Issue 3, 2014, Pages 388-399

  Kim, Ja Hee ^a   Zhou, Mengchu ^b,c   Lee, Tae Eog ^d  

^a Seoul National University of Science and Technology   (South Korea)

^b Department of Computer Science and Technology   (China)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^d Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; discrete event systems; Petri nets; scheduling

Indexed keywords

ALGEBRA; DISCRETE EVENT SIMULATION; PETRI NETS; SCHEDULING; STOCHASTIC SYSTEMS; UNCERTAINTY ANALYSIS;

CLUSTER TOOL; DISRUPTIVE EVENT; HIGH TEMPERATURE AND PRESSURE; MULTIPLE PROCESS; SCHEDULE PATTERNS; TIMED EVENT GRAPHS; WAFER ALIGNMENT; WAFER FABRICATIONS;

TOOLS;

EID: 84905857105     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2014.2315871     Document Type: Article

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