Scheduling of single-arm multi-cluster tools with wafer residency time constraints in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 28, Issue 1, 2015, Pages 117-125

  Zhu, Qinghua ^a,b   Wu, Naiqi ^a,c   Qiao, Yan ^a   Zhou, Mengchu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^c MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

Author keywords

cluster tool; Petri net; scheduling; semiconductor manufacturing

Indexed keywords

MANUFACTURE; PETRI NETS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS; TOOLS;

CLUSTER TOOL; COMPUTATIONALLY EFFICIENT; CYCLIC SCHEDULES; MULTI-CLUSTER TOOLS; PRACTICAL PROBLEMS; SCHEDULABILITY CONDITIONS; SEMICONDUCTOR MANUFACTURING; TIME CONSTRAINTS;

SCHEDULING;

EID: 84922529472     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2014.2375880     Document Type: Article

References (64)

1. W. K. Chan, J. G. Yi, and S. W. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011.
2. W. K. Chan, J. G. Yi, S. W. Ding, and D. Z. Song, "Optimal Scheduling of Multicluster Tools with Constant Robot Moving Times, Part II: Treelike topology configurations," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 17-28, Jan. 2011.
3. M. Dawande, C. Sriskandarajah, and S. P. Sethi, "On throughput maximization in constant travel-time robotic cells," Manuf. Ser. Oper. Manage, vol. 4, no. 4, pp. 296-312, 2002.
4. M. Dawande, H. N. Geismar, S. P. Sethi, and C. Sriskandarajah, Throughput optimization in robotic cells, vol. 101. New York, NY, USA: Springer, 2007.
5. S. W. Ding, J. G. Yi, and M. T. Zhang, "Multicluster tools scheduling: An integrated event graph and network model approach," IEEE Trans. Semicond. Manuf., vol. 19, no. 3, pp. 339-351, Aug. 2006.
6. H. N. Geismar, C. Sriskandarajah, and N. Ramanan, "Increasing throughput for robotic cells with parallel machines and multiple robots," IEEE Trans. Autom. Sci. Eng., vol. 1, no. 1, pp. 84-89, Jul. 2004.
7. D. Jevtic, "Method and apparatus for managing scheduling a multiple cluster tool," European Patent 1132792 A2, 2001.
8. D. Jevtic and S. Venkatesh, "Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot," U.S. Patent 6 224 638, 2001.
9. J.-H. Kim, M. C. Zhou, and T.-E. Lee. "Schedule restoration for singlearmed cluster tools," IEEE Trans. Semicond. Manuf., vol. 27, no. 3, pp. 388-399, Aug. 2014
10. D.-K. Kim and T.-E. Lee, "Cyclic scheduling of sequentially connected cluster tools with a single I/O module," in Proc. IFAC Conf. Manuf. Model. Manage. Control, Saint Petersburg, Russia, Jun. 2013, pp. 146-151.
11. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of timed-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manufacturing, vol. 16, no. 3, pp. 521-534, Aug. 2003.
12. J.-H. Kim and T.-E. Lee, "Schedulability analysis of time-constrained cluster tools with bounded time variations by an extended Petri net," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 3, pp. 490-503, Jul. 2008.
13. T.-E. Lee, H.-Y. Lee, and Y.-H. Shin, "Workload balancing and scheduling of a single-armed cluster tool," in Proc. 5th APIEMS Conf., Gold Coast, QLD, Australia, 2004, pp. 11.5.1-11.5.15.
14. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, Oct. 2005.
15. M. X. Liu and B. H. Zhou, "Modelling and scheduling analysis of multicluster tools with residency constraints based on time constraint sets," Int. J. Prod. Res., vol. 51, no. 16, pp. 4835-4852, 2013.
16. M.-J. Lopez and S.-C. Wood, "Systems of multiple cluster tools - Configuration, reliability, and performance," IEEE Trans. Semicond. Manuf., vol. 16, no. 2, pp. 170-178, May 2003.
17. K. S. Park and J. R. Morrison, "Controlled wafer release in clustered photolithography tools: Flexible flow line job release scheduling and an LMOLP heuristic," IEEE Trans. Autom. Sci. Eng., Doi: 10.1109/TASE.2014.2311997
18. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol. 7, no.3, pp. 369-373, Aug. 1994.
19. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 384-400, Aug. 1996.
20. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation," IEEE Trans. Semicond. Manuf., vol. 25, no. 3, pp. 432-446, Aug. 2012.
21. Y. Qiao, N. Q. Wu, C. R. Pan, and M. C. Zhou, "How to respond to process module failure in residency time-constrained single-arm cluster tools," IEEE Trans. Semicond. Manuf., vol. 27, no. 4, pp. 462-474, Nov. 2014.
22. Y. Qiao, N. Q. Wu, Q. H. Zhu, and L. P. Bai, "Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times," Comput. Oper. Res., vol. 53, pp. 252-260, Jan. 2015.
23. Y. Qiao, C. R. Pan, N. Q. Wu, and M. C. Zhou, "Response policies to process module failure in single-arm cluster tools subject to wafer residency time constraints," IEEE Trans. Autom. Sci. Eng., Doi: 10.1109/TASE.2014.2312823
24. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Scheduling of dual-arm cluster tools with wafer revisiting and residency time constraints," IEEE Trans. Ind. Informat., vol. 10, no. 1, pp. 286-300, Feb. 2014.
25. Y. Qiao, N. Q. Wu, and M. C. Zhou, "A Petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting," IEEE Trans. Semicond. Manuf., vol. 26, no. 1, pp. 100-110, Feb. 2013.
26. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 3, pp. 564-577, Jul. 2012.
27. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Schedulability and scheduling analysis of dual-arm cluster tools with wafer revisiting and residency time constraints based on a novel schedule," IEEE Trans. Syst., Man, Cybern., Syst., to be published. Doi: 10.1109/TSMC.2014.2347928
28. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 609-618, Oct. 2001.
29. N. Q. Wu, "Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern., C, Appl. Rev., vol. 29, no. 2, pp. 192-204, May 1999.
30. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May 2008.
31. N. Q. Wu, F. Chu, C. Chu, and M. Zhou, "Petri Net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1. pp. 42-55, Jan. 2011.
32. N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, "Petri net modeling and cycle time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern. A, Syst., Humans, vol. 43, no.1, pp. 196-207, Jan. 2013.
33. N. Q. Wu and M. C. Zhou, "Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems based on a Petri net model," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 658-669, Oct. 2001.
34. N. Q.Wu and M. C. Zhou, "Modeling and deadlock control of automated guided vehicle systems," IEEE/ASME Trans. Mechatronics, vol. 9, no. 1, pp. 50-57, Mar. 2004.
35. N. Q. Wu and M. C. Zhou, "Real-time deadlock-free scheduling for semiconductor track systems based on colored timed Petri nets," OR Spectrum, vol. 29, no. 3, pp. 421-443, 2007.
36. N. Q. Wu and M. C. Zhou, System Modeling and Control With Resource-Oriented Petri Nets. Hoboken, NJ, USA: CRC Press, Oct. 2009.
37. N. Q. Wu and M. Zhou, "Analysis of wafer sojourn time in dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Semicond. Manuf., vol. 23, no. 1, pp. 53-64, Feb. 2010.
38. N. Q. Wu and M. C. Zhou, "A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010.
39. N. Q. Wu and M. C. Zhou, "Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012.
40. N. Q. Wu and M. C. Zhou, "Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012.
41. F. J. Yang, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Optimal onewafer cyclic scheduling of single-arm multi-cluster tools with two-space buffering modules," IEEE Trans. Syst., Man, Cybern., Syst., vol. 44, no. 12, pp. 1584-1597, Nov. 2014.
42. F. J. Yang, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based polynomially complex approach to optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in semiconductor manufacturing," IEEE Trans. Syst., Man, Cybern., Syst., vol. 44, no. 12, pp. 1598-1610, Nov. 2014.
43. F. J. Yang, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in wafer fabrication," IEEE Trans. Semicond. Manuf., vol. 27, no. 2, pp. 192-203, May 2014.
44. J. G. Yi, S. W. Ding, D. Z. Song, and M. T. Zhang, "Steady-state throughput and scheduling analysis of multi-cluster tools for semiconductor manufacturing: A decomposition approach," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 2, pp. 321-336, Apr. 2008.
45. H. J. Yoon and D. Y. Lee, "Deadlock-free scheduling of photolithography equipment in semiconductor fabrication," IEEE Trans. Semicond. Manuf., vol. 17, no. 1, pp. 42-54, Feb. 2004.
46. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach," IEEE Trans. Semicond. Manuf., vol. 11, no. 3, pp. 333-357, Aug. 1998.
47. M. C. Zhou, "Deadlock avoidance methods for a distributed robotic system: Petri net modeling and analysis," J. Robot. Syst., vol. 12, no. 3, pp. 177-187, 1995.
48. M. C. Zhou, Ed., Petri Nets in Flexible and Agile Automation. London, U.K.: Kluwer, 1995.
49. M. C. Zhou and F. DiCesare, Petri Net Synthesis for Discrete Event Control of Manufacturing Systems. London, U.K.: Kluwer, 1993.
50. M. C. Zhou, F. DiCesare, and A. A. Desrochers, "A hybrid methodology for synthesis of Petri nets for manufacturing systems," IEEE Trans. Robot. Autom., vol. 8, no. 3, pp. 350-361, Jun. 1992.
51. M. C. Zhou, F. DiCesare, and D. Rudolph, "Design and implementation of a Petri net based supervisor for a flexible manufacturing system," Automatica, vol. 28, no. 6, pp. 1199-1208, 1992.
52. M. C. Zhou and M. P. Fanti, Eds., Deadlock Resolution in Computer-Integrated Systems. New York, NY, USA: Marcel Dekker, Jan. 2005.
53. M. C. Zhou and M. C. Leu, "Modeling and performance analysis of a flexible PCB assembly station using Petri nets," Trans. ASME J. Electron. Packag., vol. 113, no. 4, pp. 410-416, 1991.
54. M. C. Zhou, K. McDermott, and P. A. Patel, "Petri net synthesis and analysis of a flexible manufacturing system cell," IEEE Trans. Syst., Man, Cybern., vol. 23, no. 2, pp. 523-531, Mar./Apr. 1993.
55. M. C. Zhou and A. D. Robbi, "Applications of Petri net methodology to manufacturing systems," in Computer Control of Manufacturing Systems, S. Joshi and G. Smith, Eds. London, U.K.: Chapman and Hall, 1994, pp. 307-330.
56. M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: A Petri Net Approach. Singapore: World Scientific, 1998.
57. M. C. Zhou, K. Venkatesh, and H. Xiong, "Petri nets," in Encyclopedia of Electrical and Electronic Engineering, vol. 16, J. G. Webster, Ed. New York, NY, USA: Wiley, 1999, pp. 143-149.
58. M. C. Zhou and H. Xiong, "Petri net modeling and scheduling of automated manufacturing systems," in Computer Aided Design, Engineering, and Manufacturing: Systems Techniques and Applications (Optimization Methods for Manufacturing), vol. 4, C. T. Leondes, Ed. New York, NY, USA: Gordon and Breach, 2001, ch. 8, pp. 1-23.
59. M. C. Zhou and R. Zurawski, "Introduction to Petri nets in flexible and agile automation," in Petri Nets in Flexible and Agile Automation, M. C. Zhou, Ed. Boston, MA, USA: Kluwer, 1995, pp. 1-42.
60. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing," IEEE Trans. Semicond. Manuf., vol. 26, no. 4, pp. 578-591, Nov. 2013.
61. Q. H. Zhu, N. Q. Wu, Y. Qiao, and M. C. Zhou, "Scheduling of single-arm multi-cluster tools to achieve the minimum cycle time," in Proc. IEEE Int. Conf. Robot. Autom., Karlsruhe, Germany, May 2013, pp. 3555-3560.
62. W. M. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 562-575, Oct. 2001.
63. R. Zurawski and M. C. Zhou, "Functional and behavioral modeling of automated manufacturing systems," in Handbook of Industrial Electronic Engineering, Boca Raton, FL, USA: CRC Press, 1996, pp. 669-676.
64. R. Zurawski and M. C. Zhou, "Petri nets and industrial applications: A tutorial," IEEE Trans. Ind. Electron., vol. 41, no. 6, pp. 567-583, Dec. 1994.