Schedulability and scheduling analysis of dual-arm cluster tools with wafer revisiting and residency time constraints based on a novel schedule

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 45, Issue 3, 2015, Pages 472-484

  Qiao, Yan ^a   Wu, NaiQi ^a,b   Zhou, MengChu ^b,c  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; scheduling; semiconductor manufacturing; wafer revisiting process

Indexed keywords

ATOMIC LAYER DEPOSITION; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

CLUSTER TOOL; CYCLIC SCHEDULING; PROCESSING MODULES; SCHEDULABILITY CONDITIONS; SCHEDULING ANALYSIS; SCHEDULING STRATEGIES; SEMICONDUCTOR MANUFACTURING; WAFER FABRICATIONS;

SILICON WAFERS;

EID: 84923257092     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2014.2347928     Document Type: Article

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