Cycle time analysis of dual-arm cluster tools for wafer fabrication processes with multiple wafer revisiting times

Computers and Operations Research

Volumn 53, Issue , 2015, Pages 252-260

  Qiao, Yan ^b   Wu, Naiqi ^a,b   Zhu, Qinghua ^b   Bai, Liping ^a,b  

^a MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^b GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Cluster tools; Petri net; Scheduling; Semiconductor manufacturing

Indexed keywords

ATOMIC LAYER DEPOSITION; PETRI NETS; SCHEDULING; SILICON WAFERS; TOOLS;

ANALYTICAL EXPRESSIONS; CLUSTER TOOL; CYCLE TIME; PROCESSING MODULES; SEMICONDUCTOR INDUSTRY; SEMICONDUCTOR MANUFACTURING; STEADY STATE; WAFER FABRICATIONS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84912099375     PISSN: 03050548     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.cor.2014.03.024     Document Type: Article

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