Petri net-based optimal one-wafer scheduling of single-arm multi-cluster tools in semiconductor manufacturing

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 4, 2013, Pages 578-591

  Zhu, QingHua ^a   Wu, NaiQi ^a,b   Qiao, Yan ^a   Zhou, MengChu ^c,d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c Department of Computer Science and Technology   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tool; Petri net; Scheduling; Semiconductor manufacturing

Indexed keywords

PETRI NETS; SCHEDULING; SILICON WAFERS; TOOLS;

CLUSTER TOOL; COMPUTATIONALLY EFFICIENT; CYCLE TIME; CYCLIC SCHEDULES; CYCLIC SCHEDULING; MULTI-CLUSTER TOOLS; MULTIPLE ROBOT; SEMICONDUCTOR MANUFACTURING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 84887980429     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2278378     Document Type: Article

References (50)

1. W. K. Chan, J. G. Yi, and S. W. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011.
2. W. K. Chan, J. G. Yi, S. W. Ding, and D. Z. Song, "Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 17-28, Jan. 2011.
3. M. Dawande, C. Sriskandarajah, and S. P. Sethi, "On throughput maximization in constant travel-time robotic cells," Manuf. Service Oper. Manage., vol. 4, no. 4, pp. 296-312, 2002.
4. S. W. Ding, J. G. Yi, and M. T. Zhang, "Multicluster tools scheduling: An integrated event graph and network model approach," IEEE Trans. Semicond. Manuf., vol. 19, no. 3, pp. 339-351, Aug. 2006. (Pubitemid 44249890)
5. H. Hu, M. C. Zhou, Z. Li, and Y. Tang, "An Optimization Approach to Improved Petri Net Controller Design for Automated Manufacturing Systems," IEEE Trans. Autom. Sci. and Eng., vol. 10, no. 3, pp. 772-782, July 2013.
6. H. Hu, M. C. Zhou, Z. Li, and Y. Tang, "Deadlock-free Control of AMS with Flexible Routes and Assembly Operations Using Petri Nets," IEEE Trans Ind. Informat., vol. 9, no. 1, pp. 109-121, Feb. 2013.
7. D. Jevtic, "Method and apparatus for managing scheduling a multiple cluster tool," U.S. Patent 6519498, 2001.
8. D. Jevtic and S. Venkatesh, "Method and apparatus for scheduling wafer processing within a multiple chamber semiconductor wafer processing tool having a multiple blade robot," U.S. Patent. 6074443, 2000.
9. D.-K. Kim and T.-E. Lee, "Cyclic scheduling of sequentially connected cluster tools with a single I/O module," in Proc. IFAC Conf. Manuf. Model. Manage. Control, vol. 7. part 1, Saint Petersburg, Russia, 2013, pp.146-151.
10. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of timed-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 16, no. 3, pp. 521-534, Aug. 2003.
11. T.-E. Lee, H.-Y. Lee, and Y.-H. Shin, "Workload balancing and scheduling of a single-armed cluster tool," in Proc. 5th APIEMS Conf., 2004, pp. 11.5.1-11.5.15.
12. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for timed window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, Oct. 2005. (Pubitemid 41560387)
13. M.-J. Lopez and S.-C. Wood, "Systems of multiple cluster tools: Configuration, reliability, and performance," IEEE Trans. Semicond. Manuf., vol. 16, no. 2, pp. 170-178, May 2003.
14. T. L. Perkinson, P. K. MacLarty, R. S. Gyurcsik, and R. K. Cavin, III, "Single-wafer cluster tool performance: An analysis of throughput," IEEE Trans. Semicond. Manuf., vol. 7, no. 3, pp. 369-373, Aug. 1994.
15. T. L. Perkinson, R. S. Gyurcsik, and P. K. MacLarty, "Single-wafer cluster tool performance: An analysis of the effects of redundant chambers and revisitations sequences on throughput," IEEE Trans. Semicond. Manuf., vol. 9, no. 3, pp. 384-400, Aug. 1996. (Pubitemid 126776269)
16. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation," IEEE Trans. Semicond. Manuf., vol. 25, no. 3, pp. 432-446, Aug. 2012.
17. Y. Qiao, N. Q. Wu, and M. C. Zhou, "Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 3, pp. 564-577, Jul. 2012.
18. Y. Qiao, N. Q. Wu, and M. C. Zhou, "A Petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting," IEEE Trans. Semicond. Manuf., vol. 26, no. 1, pp. 100-110, Feb. 2013.
19. S. Rostami, B. Hamidzadeh, and D. Camporese, "An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 609-618, Oct. 2001. (Pubitemid 33137777)
20. S. Venkatesh, R. Davenport, P. Foxhoven, and J. Nulman, "A steady state throughput analysis of cluster tools: Dual-blade versus single-blade robots," IEEE Trans. Semicond. Manuf., vol. 10, no. 4, pp. 418-424, Nov. 1997. (Pubitemid 127763010)
21. N. Q. Wu, "Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model," IEEE Trans. Syst., Man, Cybern. C, vol. 29, no. 2, pp. 192-204, May 1999.
22. N. Q. Wu, C. B. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May 2008.
23. N. Q. Wu, F. Chu, C. Chu, and M. Zhou, "Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 42-55, Jan. 2011.
24. N. Q. Wu, F. Chu, C. B. Chu, and M. C. Zhou, "Petri net modeling and cycle time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern. Syst., vol. 43, no. 1, pp. 196-207, Jan. 2013.
25. N. Q. Wu and M. C. Zhou, "Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems based on a Petri net model," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 658-669, Oct. 2001.
26. N. Q. Wu and M. C. Zhou, "Modeling and deadlock control of automated guided vehicle systems," IEEE/ASME Trans. Mechatron., vol. 9, no. 1, pp. 50-57, Mar. 2004.
27. N. Q. Wu and M. C. Zhou, System modeling and control with Resourceoriented Petri Nets. New York, NY, USA: Taylor and Francis, 2009.
28. N. Q. Wu and M. Zhou, "Analysis of wafer sojourn time in dualarm cluster tools with residency time constraint and activity time variation," IEEE Trans. Semicond. Manuf., vol. 23, no. 1, pp. 53-64, Feb. 2010.
29. N. Q. Wu and M. C. Zhou, "A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010.
30. N. Q. Wu and M. C. Zhou, "Process vs resource-oriented Petri net modeling of automated manufacturing systems," Asian J. Control, vol. 12, no. 3, pp. 267-280, 2010.
31. N. Q. Wu and M. C. Zhou, "Colored timed Petri nets for modeling and analysis of cluster tools," Asian J. Control, vol. 12, no. 3, pp. 253-266, 2010.
32. N. Q. Wu and M. C. Zhou, "Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012.
33. N. Q. Wu and M. C. Zhou, "Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012.
34. N. Q. Wu, M. C. Zhou, F. Chu, and C. B. Chu, "A Petri-net-based scheduling strategy for dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern. Syst., vol. 43, no. 5, pp. 1182-1194, 2013.
35. J. G. Yi, S. W. Ding, D. Z. Song, and M. T. Zhang, "Steady-state throughput and scheduling analysis of multi-cluster tools for semiconductor manufacturing: A decomposition approach," IEEE Trans. Autom. Sci. Eng., vol. 5, no. 2, pp. 321-336, Apr. 2008. (Pubitemid 351506277)
36. M. C. Zhou and M. D. Jeng, "Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems: A Petri net approach," IEEE Trans. Semicond. Manuf., vol. 11, no. 3, pp. 333-357, Aug. 1998. (Pubitemid 128742374)
37. M. C. Zhou and K. Venkatesh, Modeling, Simulation and Control of Flexible Manufacturing Systems: A Petri Net Approach. Singapore: World Scientific, 1998.
38. M. C. Zhou, Ed., Petri Nets in Flexible and Agile Automation. London, U.K.: Kluwer, 1995.
39. M. C. Zhou and F. DiCesare, Petri Net Synthesis for Discrete Event Control of Manufacturing Systems. London, U.K.: Kluwer Academic, 1993.
40. M. C. Zhou and M. P. Fanti, Eds., Deadlock Resolution in Computer-Integrated Systems. New York, NY, USA: Marcel Dekker, Jan. 2005.
41. M. C. Zhou and R. Zurawski, "Introduction to Petri nets in flexible and agile automation," in Petri Nets in Flexible and Agile Automation, M. C. Zhou, Ed. Boston, MA, USA: Kluwer, 1995, pp. 1-42.
42. M. C. Zhou and F. DiCesare, "Adaptive design of Petri net controllers for error recovery in automated manufacturing systems," IEEE Trans. Syst., Man, Cybern., vol. 19, no. 5, pp. 963-973, 1989. (Pubitemid 20642878)
43. M. C. Zhou and F. DiCesare, "Parallel and sequential mutual exclusions for Petri net modeling for manufacturing systems with shared resources," IEEE Trans. Robot. Autom., vol. 7, no. 4, pp. 515-527, Aug. 1991.
44. M. C. Zhou and M. C. Leu, "Modeling and performance analysis of a flexible PCB assembly station using petri nets," Trans. ASME, J. Electron. Packaging, vol. 113, no. 4, pp. 410-416, 1991.
45. M. C. Zhou, F. DiCesare, and A. A. Desrochers, "A hybrid methodology for synthesis of petri nets for manufacturing systems," IEEE Trans. Robot. Autom., vol. 8, no. 3, pp. 350-361, 1992.
46. M. C. Zhou, F. DiCesare, and D. Rudolph, "Design and implementation of a petri net based supervisor for a flexible manufacturing system," IFAC J. Automatica, vol. 28, no. 6, pp. 1199-1208, 1992. (Pubitemid 23587956)
47. M. C. Zhou, K. McDermott, and P. A. Patel, "Petri net synthesis and analysis of a flexible manufacturing system cell," IEEE Trans. Syst., Man, Cybern., vol. 23, no. 2, pp. 523-531, Mar.-Apr. 1993. (Pubitemid 23694031)
48. W. M. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 562-575, Oct. 2001. (Pubitemid 33137773)
49. R. Zurawski and M. C. Zhou, "Functional and behavioral modeling of automated manufacturing systems," in Handbook of Industrial Electronic Engineering, CRC Press, 1996, pp. 669-676.
50. R. Zurawski and M. C. Zhou, "Petri nets and industrial applications: a tutorial," IEEE Trans. on Industrial Electronics, vol. 41, no. 6, pp. 567-583, Dec. 1994.