Scheduling lot switching operations for cluster tools

IEEE Transactions on Semiconductor Manufacturing

Volumn 26, Issue 4, 2013, Pages 592-601

  Lee, Jun Ho ^a   Kim, Hyun Jung ^b   Lee, Tae Eog ^b  

^a SAMSUNG Electronics   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tools; Deadlock prevention; Lot switching; Petri net; Scheduling

Indexed keywords

CLUSTER TOOL; COMPUTATIONAL EXPERIMENT; DEADLOCK PREVENTION; LOT SWITCHING; MIXED INTEGER PROGRAMMING MODEL; SCHEDULING COMPLEXITY; SCHEDULING STRATEGIES; SEMICONDUCTOR INDUSTRY;

HEURISTIC METHODS; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; SWITCHING;

TOOLS;

EID: 84887923282     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2013.2281083     Document Type: Article

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