Real-time control policy for single-arm cluster tools with residency time constraints and activity time variation by using Petri net

Proceedings of 2012 9th IEEE International Conference on Networking, Sensing and Control, ICNSC 2012

Volumn , Issue , 2012, Pages 34-39

  Qiao, Yan ^a   Wu, NaiQi ^a   Zhou, MengChu ^b  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

cluster tool; Petri net; scheduling; semiconductor manufacturing

Indexed keywords

ACTIVITY TIME; CLUSTER TOOL; FEASIBLE SCHEDULE; ILLUSTRATIVE EXAMPLES; PROCESSING STEPS; REAL-TIME OPERATION; SEMICONDUCTOR MANUFACTURING; SOJOURN TIME; TIME CONSTRAINTS; WAITING TIME;

PETRI NETS; REAL TIME CONTROL; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

TOOLS;

EID: 84863106136     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICNSC.2012.6204887     Document Type: Conference Paper

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