Petri net-based optimal one-wafer cyclic scheduling of hybrid multi-cluster tools in wafer fabrication

IEEE Transactions on Semiconductor Manufacturing

Volumn 27, Issue 2, 2014, Pages 192-203

  Yang, Fajun ^a   Wu, Naiqi ^b,c   Qiao, Yan ^a   Zhou, Mengchu ^d  

^a GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^b MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^c TONGJI UNIVERSITY   (China)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Multi cluster tools; Petri net (PN); scheduling; semiconductor manufacturing

Indexed keywords

PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

CLUSTER TOOL; CYCLIC SCHEDULING; MULTI-CLUSTER TOOLS; PERIODIC SCHEDULE; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING; TIMED PETRI NET; WAFER FABRICATIONS;

TOOLS;

EID: 84900817063     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2014.2312192     Document Type: Article

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