Nonthermal Plasma Synthesis of Silicon Nanocrystals

Silicon Nanocrystals: Fundamentals, Synthesis and Applications

Volumn , Issue , 2010, Pages 309-348

  Mangolini, Lorenzo ^a   Kortshagen, Uwe ^a  

^a UNIVERSITY OF MINNESOTA   (United States)

Author keywords

Amorphous silicon films; Background gas; Crystalline silicon; Particle nucleation; Particle size distribution; Silane plasmas

Indexed keywords

EID: 84888707598     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1002/9783527629954.ch13     Document Type: Chapter

References (111)

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