On the growth mechanism of a-Si:H

Thin Solid Films

Volumn 383, Issue 1-2, 2001, Pages 154-160

  Kessels, W M M ^a   Smets, A H M ^a   Marra, D C ^b   Aydil, E S ^b   Schram, D C ^a   Van De Sanden, M C M ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROGENATION; PLASMAS; SILANES; SURFACE PHENOMENA; THERMAL EFFECTS;

HYDROGEN ELIMINATION;

AMORPHOUS SILICON;

EID: 0035246796     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01594-7     Document Type: Article

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