Particle coating in seeded dusty plasma reactor: Distribution of deposition rates

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 5, 2003, Pages 2011-2017

  Cao, Jin ^a   Matsoukas, Themis ^a  

^a The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; DEPOSITION; MATHEMATICAL MODELS; PARTICLE SIZE ANALYSIS; SILICA; TRANSMISSION ELECTRON MICROSCOPY;

FOURIER DECONVOLUTION METHOD; LOW PRESSURE RADIO FREQUENCY PLASMA; PARTICLE COATING; SEEDED DUSTY PLASMA REACTOR;

PLASMAS;

EID: 0242425725     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1603283     Document Type: Article

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