SCOPUS 정보 검색 플랫폼

Journal of Applied Physics

Volumn 91, Issue 9, 2002, Pages 5571-5580

Anion reactions in silane plasma

(3) Gallagher, Alan a Howling, A A b Hollenstein, Ch b

a UNIVERSITY OF COLORADO (United States)

b EPFL (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ANION CHEMISTRY; ELECTRON ATTACHMENT; ELECTRON DECAY; LOW ENERGY ELECTRONS; NEUTRALIZATION RATE; PRIOR ESTIMATES; PULSED DISCHARGE; RADICAL DENSITIES; RADICAL REACTIONS; SILANE PLASMAS; TWO SOURCES;

ELECTRIC DISCHARGES; REACTION KINETICS;

NEGATIVE IONS;

EID: 0036572620 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1459758 Document Type: Article

Times cited : (46)

References (15)

1
- 0001768863
- edited by A. Bouchell (Wiley, Chichester, 1999)
- J. Perrin and Ch. Hollenstein, in Dusty Plasmas, edited by A. Bouchell (Wiley, Chichester, 1999), pp. 77-180.
- Dusty Plasmas , pp. 77-180
- Perrin, J.¹ Hollenstein, Ch.²

2
- 0034238651
- pre PLEEE8 1063-651X
- A. Gallagher, Phys. Rev. E 62, 2690 (2000). pre PLEEE8 1063-651X
- (2000) Phys. Rev. e , vol.62 , pp. 2690
- Gallagher, A.¹

3
- 36449008361
- jaJAPIAU 0021-8979
- A. A. Howling, L. Sansonnens, J.-L. Dorier, and Ch. Hollenstein, J. Appl. Phys. 75, 1340 (1994). jap JAPIAU 0021-8979
- (1994) J. Appl. Phys. , vol.75 , pp. 1340
- Howling, A.A.¹ Sansonnens, L.² Dorier, J.-L.³ Hollenstein, Ch.⁴

4
- 84967508860
- pac PACHAS 0033-4545
- A. A. Howling, C. Courteille, J.-L. Dorier, L. Sansonnens, and Ch. Hollenstein, Pure Appl. Chem. 68, 1017 (1996). pac PACHAS 0033-4545
- (1996) Pure Appl. Chem. , vol.68 , pp. 1017
- Howling, A.A.¹ Courteille, C.² Dorier, J.-L.³ Sansonnens, L.⁴ Hollenstein, Ch.⁵

5
- 0030134021
- pst PSTEEU 0963-0252
- C. Courteille, J.-L. Dorier, Ch. Hollenstein, L. Sansonnens, and A. A. Howling, Plasma Sources Sci. Technol. 5, 210 (1996). pst PSTEEU 0963-0252
- (1996) Plasma Sources Sci. Technol. , vol.5 , pp. 210
- Courteille, C.¹ Dorier, J.-L.² Hollenstein, Ch.³ Sansonnens, L.⁴ Howling, A.A.⁵

6
- 0032675570
- mrs MRSPDH 0272-9172
- Ch. Hollenstein, A. A. Howling, C. Courteille, J.-L. Dorier, L. Sansonnens, D. Magni, and H. Mueller, Mater. Res. Soc. Symp. Proc. 507, 547 (1998). mrs MRSPDH 0272-9172
- (1998) Mater. Res. Soc. Symp. Proc. , vol.507 , pp. 547
- Hollenstein, Ch.¹ Howling, A.A.² Courteille, C.³ Dorier, J.-L.⁴ Sansonnens, L.⁵ Magni, D.⁶ Mueller, H.⁷

7
- 84861453825
- pre PLEEE8 1063-651X
- M. Yan, A. Bogearts, R. Gijbels, and W. J. Goedheer, Phys. Rev. E 63, 26405 (2001). pre PLEEE8 1063-651X
- (2001) Phys. Rev. e , vol.63 , pp. 26405
- Yan, M.¹ Bogearts, A.² Gijbels, R.³ Goedheer, W.J.⁴

8
- 4043105192
- jaJAPIAU 0021-8979
- M. J. Kushner, J. Appl. Phys. 63, 2532 (1988). jap JAPIAU 0021-8979
- (1988) J. Appl. Phys. , vol.63 , pp. 2532
- Kushner, M.J.¹

9
- 0025482294
- pcPCPPDW 0272-4324
- R. Winkler, M. Capitelli, C. Gorse, and J. Wilhelm, Plasma Chem. Plasma Process. 10, 419 (1979). pcp PCPPDW 0272-4324
- (1979) Plasma Chem. Plasma Process. , vol.10 , pp. 419
- Winkler, R.¹ Capitelli, M.² Gorse, C.³ Wilhelm, J.⁴

10
- 0000399886
- jaJAPIAU 0021-8979
- L. A. Pinnaduwage and P. G. Datskos, J. Appl. Phys. 81, 7715 (1997). jap JAPIAU 0021-8979
- (1997) J. Appl. Phys. , vol.81 , pp. 7715
- Pinnaduwage, L.A.¹ Datskos, P.G.²

11
- 0001883643
- cpCPPHEP 0863-1042
- J. Perrin, O. Leroy, and M. C. Bordage, Contrib. Plasma Phys. 36, 3 (1996). cpp CPPHEP 0863-1042
- (1996) Contrib. Plasma Phys. , vol.36 , pp. 3
- Perrin, J.¹ Leroy, O.² Bordage, M.C.³

12
- 0000613904
- jaJAPIAU 0021-8979
- T. Fukuzawa, K. Obata, H. Kawasaki, M. Shiritani, and Y. Watanabe, J. Appl. Phys. 80, 3202 (1996). jap JAPIAU 0021-8979
- (1996) J. Appl. Phys. , vol.80 , pp. 3202
- Fukuzawa, T.¹ Obata, K.² Kawasaki, H.³ Shiritani, M.⁴ Watanabe, Y.⁵

13
- 0007088530
- jaJAPIAU 0021-8979
- C. B. Fleddermann, J. H. Beberman, and J. T. Verdeyen, J. Appl. Phys. 58, 1344 (1985). jap JAPIAU 0021-8979
- (1985) J. Appl. Phys. , vol.58 , pp. 1344
- Fleddermann, C.B.¹ Beberman, J.H.² Verdeyen, J.T.³

14
- 0001040588
- pra PLRAAN 1050-2947
- D. A. Doughty and A. Gallagher, Phys. Rev. A 42, 6166 (1990). pra PLRAAN 1050-2947
- (1990) Phys. Rev. A , vol.42 , pp. 6166
- Doughty, D.A.¹ Gallagher, A.²

15
- 49649158969
- cph CHPLBC 0009-2614
- L. G. Christophoru and R. P. Braunstein, Chem. Phys. Lett. 12, 173 (1971). cph CHPLBC 0009-2614
- (1971) Chem. Phys. Lett. , vol.12 , pp. 173
- Christophoru, L.G.¹ Braunstein, R.P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.