Detection of particles in rf silane plasmas using photoemission method

Journal of Applied Physics

Volumn 80, Issue 6, 1996, Pages 3202-3207

  Fukuzawa, Tsuyoshi ^a   Obata, Kouji ^a   Kawasaki, Hiroharu ^a   Shiratani, Masaharu ^a   Watanabe, Yukio ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000613904     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.363273     Document Type: Article

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