Model of particle growth in silane discharges

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 62, Issue 2, 2000, Pages 2690-2706

  Gallagher, Alan ^a  

^a UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANION; CATION; ELECTRODE GAP; PLASMA CHEMISTRY;

CHARGED PARTICLES; ELECTRODES; ELECTRONIC DENSITY OF STATES; GROWTH (MATERIALS); MATHEMATICAL MODELS; NUMERICAL METHODS; PLASMA COLLISION PROCESSES; PLASMA DENSITY; PLASMAS; SILANES;

ELECTRIC DISCHARGES;

EID: 0034238651     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.62.2690     Document Type: Article

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