Absolute atomic hydrogen densities in a radio frequency discharge measured by two-photon laser induced fluorescence imaging

Journal of Applied Physics

Volumn 85, Issue 2, 1999, Pages 696-702

  Cherigier L ^a,b   Czarnetzki, U ^a   Luggenholscher D ^a   Schulz Von Der Gathen, V ^a   Dobele H F ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

^b AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000008453     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.369149     Document Type: Article

References (28)

1. J. R. Roth, Industrial Plasma Engineering (Institute of Physics, London, 1995).
2. B. Chapman, Glow Discharge Processes (Wiley, New York, 1980).
3. IEEE Trans. Plasma Sci. PS-14, 2 (1986).
4. Anon., Plasma Processing of Materials: Scientific Opportunities and Technological Challenges (National Academic, Washington DC, 1991).
5. K. Nomoto, Y. Urano, J. L. Guizot, G. Ganguly, and A. Matsuda, Jpn. J. Appl. Phys., Part 2 29, L1372 (1990).
6. D. P. Dowling, T. P. O'Brian, H. F. Döbele, V. Kornas, W. G. Graham, and R. Cheshire, Diamond Relat. Mater. 3, 702 (1994).
7. T. G. M. Freegarde and G. Hancock, J. Phys. IV, C4-15 (1997).
8. U. Czarnetzki, J. Phys. IV 7, C4-175 (1997).
9. U. Czarnetzki, K. Miyazaki, T. Kajiwara, K. Muraoka, M. Maeda, and H. F. Döbele, J. Vac. Sci. Technol. A 12, 831 (1994).
10. J. E. M. Goldsmith and L. A. Rahn, Opt. Lett. 15, 814 (1990).
11. P. J. Hargis, K. E. Greenberg, P. A. Miller, J. B. Gerado, and J. R. Torczynski, Rev. Sci. Instrum. 65, 140 (1994).
12. M. A. Sobolewski, J. Res. Natl. Inst. Stand. Technol. 100, 341 (1995).
13. C. Moore, Atomic Energy Levels (Natl. Stand. Ref. Data Ser., Natl. Bur. Stand (U.S.), Washington, 1971), Vol. III.
14. A. Goehlich, T. Kawetzki, and H. F. Döbele, J. Chem. Phys. 108, 9362 (1998).
15. D. W. Setser, Reactive Intermediates in the Gas Phase (Academic, New York, 1979).
16. U. Meier, K. Kohse-Höinghaus, L. Schäfer, and C.-P. Klages, Appl. Opt. 29, 4993 (1990).
17. J. Bittner, K. Kohse-Höinghaus, U. Meier, and Th. Just, Chem. Phys. Lett. 143, 571 (1988).
18. B. L. Preppernau, K. Pearce, A. Tserepi, E. Wurzberg, and T. A. Miller, Chem. Phys. 196, 371 (1995).
19. W. Demtröder, Laser Spectroscopy (Springer, Heidelberg, 1981).
20. R. Loudon, The Quantum Theory of Light (Clarendon, Oxford, 1973).
21. B. K. McMillin and M. R. Zachariah, Proceedings of the 12th International Symposium on Plasma. Chem., Minneapolis, MN, 1995, Vol. 1, p. 539.
22. M. B. Hopkins, Proceedings of Frontiers in Low Temperature Plasma Diagnostics II, Bad Honnef, 1997, p. 19.
23. B. L. Preppernau and T. A. Miller in Glow Discharge Spectroscopy, edited by R. K. Marcus (Plenum, New York, 1993).
24. F. Tochikubo, T. Makabe, S. Kakuta, and A. Suzuki, J. Appl. Phys. 71, 2143 (1992).
25. M. M. Turner and M. B. Hopkins, Phys. Rev. Lett. 69, 3511 (1992).
26. C. M. O. Mahony, R. Al Wazzan, and W. G. Graham, Appl. Phys. Lett. 71, 608 (1997).
27. A. D. Tserepi, J. R. Dunlop, B. Preppernau, and T. A. Miller, J. Appl. Phys. 72, 2638 (1992).
28. S. M. Levitzky, Zh. Tekh. Fiz. 27, 970 (1957).