Nitrogen effect on the dust presence and behavior in a radio frequency CH4/N2 discharge

Journal of Applied Physics

Volumn 103, Issue 3, 2008, Pages

  Ṕreira, J́ŕmy ^a   Massereau Guilbaud, V́ronique ^a   Ǵraud Grenier, Isabelle ^a   Plain, Andŕ ^a  

^a LASEP   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; LASER BEAMS; OSCILLATORS (ELECTRONIC); PARAMETER ESTIMATION; SCATTERING;

LASER BEAM EXTINCTION; PARTICLE MULTIGENERATION;

RADIO FREQUENCY AMPLIFIERS;

EID: 39349085019     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2829782     Document Type: Article

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