Self-excited instability occurring during the nanoparticle formation in an Ar-SiH4 low pressure radio frequency plasma

Journal of Applied Physics

Volumn 99, Issue 6, 2006, Pages

  Cavarroc, M ^a   Jouanny, M C ^a   Radouane, K ^a   Mikikian, M ^a   Boufendi, L ^a  

^a UNIVERSITÉ D'ORLÉANS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; ELECTRIC DISCHARGES; HARMONIC ANALYSIS; IONIZATION; MIXTURES; PLASMAS; STABILITY;

ARGON-SILANE MIXTURE; DUST NANOPARTICLE; RADIO FREQUENCY PLASMA; SELF-BIAS VOLTAGE;

NANOSTRUCTURED MATERIALS;

EID: 33645792297     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2179973     Document Type: Article

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