Time-dependent gas phase kinetics in a hydrogen diluted silane plasma

Applied Physics Letters

Volumn 94, Issue 7, 2009, Pages

  Nunomura, S ^a   Yoshida, I ^a,b   Kondo, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b SANYO ELECTRIC CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DYNAMICS; HYDROGEN; PLASMA DENSITY; PLASMAS; POLYSILANES; SILANES;

DENSITY REDUCTIONS; DIFFERENT TIME SCALE; DISILANE; ELECTRODE HEATING; GAS-PHASE COMPOSITIONS; GAS-PHASE KINETICS; HIGH-PRESSURE HYDROGENS; HYDROGEN DILUTED SILANES; NANOPARTICLE FORMATIONS; SILYL RADICALS; TIME DEPENDENTS; TIME-RESOLVED; TIME-SCALES;

GASES;

EID: 60749123970     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3086312     Document Type: Article

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