SCOPUS 정보 검색 플랫폼

Volumn 43, Issue 12, 2010, Pages

Phase resolved optical emission spectroscopy: A non-intrusive diagnostic to study electron dynamics in capacitive radio frequency discharges

(5) Schulze, J a Schungel E a Donko Z b Luggenholscher D a Czarnetzki, U a

a RUHR UNIVERSITY BOCHUM (Germany)

b INSTITUTE OF EXPERIMENTAL MEDICINE (Hungary)

Author keywords

[No Author keywords available]

Indexed keywords

BIOCOMPATIBLE SURFACES; CAPACITIVELY COUPLED; DIFFERENT FREQUENCY; DUAL FREQUENCY; ELECTRIC FIELD REVERSAL; ELECTRON DENSITIES; ELECTRON DYNAMICS; ELECTRON ENERGY DISTRIBUTION FUNCTIONS; ELECTRON HEATING; ENERGETIC ELECTRON; EXCITATION DYNAMICS; FREQUENCY COUPLING; NON-INTRUSIVE; NON-INTRUSIVE DIAGNOSTICS; PHASE RESOLVED OPTICAL EMISSION SPECTROSCOPY; PHYSICAL NATURE; PLASMA PARAMETER; RADIO FREQUENCIES; RADIO FREQUENCY DISCHARGES; RARE GAS; TEMPORAL RESOLUTION; TIME-DEPENDENT MODELS;

COUPLED CIRCUITS; DISTRIBUTION FUNCTIONS; DYNAMICS; ELECTRIC FIELDS; ELECTRON BEAMS; ELECTRON ENERGY ANALYZERS; ELECTRON SCATTERING; ELECTRON TEMPERATURE; EMISSION SPECTROSCOPY; INDUCTIVELY COUPLED PLASMA; INERT GASES; IONIZATION OF GASES; LIGHT EMISSION; OPTICAL EMISSION SPECTROSCOPY; PHOTORESISTS; RADIO; RADIO WAVES;

ELECTRIC DISCHARGES;

EID: 77949493424 PISSN: 00223727 EISSN: 13616463 Source Type: Journal
DOI: 10.1088/0022-3727/43/12/124016 Document Type: Article

Times cited : (113)

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