Nanoparticles in SiH4-Ar plasma: Modelling and comparison with experimental data

Journal of Applied Physics

Volumn 110, Issue 10, 2011, Pages

  Gordiets, B F ^a   Inestrosa Izurieta, M J ^b   Navarro, A ^c   Bertran, E ^b  

^a LEBEDEV PHYSICAL INSTITUTE   (Russian Federation)

^b UNIVERSITY OF BARCELONA   (Spain)

^c UNIVERSITAT POLITÈCNICA DE CATALUNYA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AR PLASMAS; CRITICAL DIMENSION; DISCHARGE POWER; DISTINCTIVE FEATURES; EXPERIMENTAL DATA; EXPERIMENTAL MEASUREMENTS; FUNCTION OF TIME; GENERATION AND GROWTH; GROWTH PROCESS; HIGH PRESSURE; KINETIC MODELS; LOW PRESSURES; MODEL CALCULATIONS; PARTICLE PRODUCTION; RADIO FREQUENCY DISCHARGES; SILICON NANOPARTICLES; THEORETICAL INVESTIGATIONS; TOTAL PRESSURE;

CHEMICAL REACTORS; DIMERS; GAS MIXTURES; GASES; NANOPARTICLES;

ELECTRIC DISCHARGES;

EID: 82555167416     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3658249     Document Type: Conference Paper

References (38)

1. Dusty Plasmas, edited by, A. Bouchoule, (Wiley, New York, 1999).
2. L. Boufendi, A. Plain, J. Ph. Blondeau, A. Bouchoule, C. Laure, and M. Toogood, Appl. Phys. Lett. 60, 169 (1992). 10.1063/1.106981
3. A. Bouchoule and L. Boufendi, Plasma Sources Sci.Technol. 2, 204 (1993). 10.1088/0963-0252/2/3/011
4. L. Boufendi, J. Hermann, A. Bouchoule, B. Dubreuil, E. Stoffels, W. Stoffels, and M. de Giorgi, J. Appl. Phys. 76, 148 (1994). 10.1063/1.357120
5. L. Boufendi and A. Bouchoule, Plasma Sources Sci.Technol. 3, 262 (1994). 10.1088/0963-0252/3/3/004
6. Ch. Hollenstein, J.-L. Dorier, J. Dutta, L. Sansonnens, and A. Howling, Plasma Sources Sci. Technol. 3, 278 (1994). 10.1088/0963-0252/3/3/007
7. C. Courteille, Ch. Hollenstein, J.-L. Dorier, E. Bertran, G. Viera, R. Martins, and A. Macarico, J. Appl. Phys. 80, 2069 (1996). 10.1063/1.363118
8. Y. Watanabe, M. Shiratani, T. Fukuzawa, H. Kawasaki, Y. Ueda, S. Singh, and H. Ohkura, J. Vac. Sci.Technol. A 14 (3), 995 (1996). 10.1116/1.580069 (Pubitemid 126082201)
9. H. Kawasaki, K. Sakamoto, S. Maeda, T. Fukuzawa, M. Shiratani, and Y. Watanabe, Jpn. J. Appl. Phys. Part 1 37, 5757 (1998). 10.1143/JJAP.37.5757
10. M. Shiratani, T. Fukuzama, and Y. Watanabe, Jpn. J. Appl. Phys. Part 1 38, 4542 (1999). 10.1143/JJAP.38.4542
11. Y. Matsuoka, M. Shiratani, T. Fukuzawa, Y. Watanabe, and K-S. Kim, Jpn. J. Appl. Phys. Part 1 38, 4556 (1999). 10.1143/JJAP.38.4556
12. T. Fukuzama, S. Kushima, Y. Matsuoka, M. Shiratani, and Y. Watanabe, J. Appl. Phys. 86, 3543 (1999). 10.1063/1.371256
13. G. Viera, S. Huet, E. Bertran, and L. Boufendi, J. Appl. Phys. 90, 4272 (2001). 10.1063/1.1398066
14. G. Viera, M. Mikikian, E. Bertran, P. Roca i Cabarrocas, and L. Boufendi, J. Appl. Phys. 92, 4684 (2002). 10.1063/1.1506382 (Pubitemid 35328349)
15. Z. Shen, T. Kim, U. Kortshagen, P. H. McMurry, and S. A. Campbella, J. Appl. Phys. 94, 2277 (2003). 10.1063/1.1591412
16. I. B. Denysenko, K. Ostrikov, S. Xu, M. Y. Yu, and C. H. Diong, J. Appl. Phys. 94, 6097 (2003). 10.1063/1.1618356
17. C. S. Kim, W. K. Youn, and N. M. Hwang, J. Appl. Phys. 108, 014313 (2010). 10.1063/1.3452352
18. M. Shigeta and T. Watanabe, J. Appl. Phys. 108, 043306 (2010). 10.1063/1.3464228
19. U. Kortshagen and U. Bhandarkar, Phys. Rev. E: Stat. Phys., Plasmas, Fluids, Relat. Interdiscip. 60, 887 (1999). 10.1103/PhysRevE.60.887
20. U. Bhandarkar, M. Swihart, S. Girshik, and U. Kortshagen, J. Phys. D: Appl. Phys. 33, 2731 (2000). 10.1088/0022-3727/33/21/311 (Pubitemid 32020616)
21. U. Bhandarkar, U. Kortshagen, and S. Girshik, J. Phys. D: Appl. Phys. 36, 1399 (2003). 10.1088/0022-3727/36/12/307
22. K. de Bleecker, A. Bogaerts, R. Gijbels, and W. Goedheer, Phys. Rev. E: Stat. Phys., Plasmas, Fluids, Relat. Interdiscip. Top. 69, 056409, (2004);
23. K. De Bleeker, A. Bogaerts, and W. Goedheer, Phys. Rev. E: Stat. Phys., Plasmas, Fluids, Relat. Interdiscip. Top. 70, 056407 (2004). 10.1103/PhysRevE.69.056409
24. A. Fridman, L. Boufendi, T. Hbid, B. Potapkin, and A. Bouchoule, J. Appl. Phys. 79, 1303 (1996). 10.1063/1.361026
25. D. Lemons, R. Keinigs, D. Winske, and M. Jones, Appl. Phys. Lett. 68, 613 (1996). 10.1063/1.116485 (Pubitemid 126683906)
26. A. Gallagher, Phys. Rev. E: Stat. Phys., Plasmas, Fluids, Relat. Interdiscip. Top. 62, 2690 (2000). 10.1103/PhysRevE.62.2690
27. B. Gordiets and E. Bertran, Chem. Phys. Lett. 414, 423 (2005). 10.1016/j.cplett.2005.07.071 (Pubitemid 41393645)
28. B. Gordiets and E. Bertran, Russ. J. Phys. Chem. 2, 315 (2008). 10.1134/S1990793108020243
29. B. Gordiets and E. Bertran, Tech. Phys. 54, 674 (2009). 10.1134/S1063784209050119
30. S. Choi and M. Kushner, J. Appl. Phys. 74, 853 (1993). 10.1063/1.354877
31. M. Kushner, J. Appl. Phys. 63, 2532 (1988). 10.1063/1.340989
32. M. Coltrin, R. Kee, and A. Miller, J. Electrochem. Soc. 133, 1206 (1986). 10.1149/1.2108820
33. J. Perrin, J. P. M. Schmitt, G. De Rosny, B. Drevillon, J. Huc, and A. Lloret, Chem. Phys. 73, 383 (1982). 10.1016/0301-0104(82)85177-X
34. V. Rusanov and A. Fridman Physics of Chemically Active Plasma (Nauka, Moscow 1984) (in Russian).
35. G. Inoue and M. Suzuki, Chem. Phys. Lett. 122, 361 (1985) 10.1016/0009-2614(85)80237-2
36. E. Meeks, R. S. Larson, P. Ho, C. Apblett, S. M. Han, E. Edelberg, and E. S. Aydil, J. Vac. Sci. Technol. A 16, 544 (1998). 10.1116/1.581096 (Pubitemid 128046767)
37. B. Gordiets and C. M. Ferreira, J. Appl. Phys. 84, 1231 (1998). 10.1063/1.368188
38. B. Gordiets and C. M. Ferreira, J. Appl. Phys. 86, 4118 (1999). 10.1063/1.371336