Experiment and modelling of very low frequency oscillations in RF-PECVD: A signature for nanocrystal dynamics

Plasma Sources Science and Technology

Volumn 17, Issue 3, 2008, Pages

  Johnson, E V ^a   Djeridane, Y ^a   Abramov, A ^a   Roca I Cabarrocas, P ^a  

^a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMICS; GERMANIUM COMPOUNDS; NANOCRYSTALLINE MATERIALS; NANOPARTICLES; OPTICAL EMISSION SPECTROSCOPY; PLASMA DIAGNOSTICS; SILICON COMPOUNDS;

AMORPHOUS AND NANOCRYSTALLINE MATERIALS; FEEDBACK MECHANISMS; NANO-CRYSTALLINE FILMS; OSCILLATION FREQUENCY; PARTICLE RESIDENCE TIME; PLASMA DYNAMICS; VERY LOW FREQUENCY; ZERO-DIMENSIONAL MODELS;

NANOCRYSTALS;

EID: 51849126817     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/3/035029     Document Type: Article

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