Polysilicon thin-film transistors on polymer substrates

Materials Science in Semiconductor Processing

Volumn 15, Issue 6, 2012, Pages 627-641

  Fortunato, Guglielmo ^a   Pecora, Alessandro ^a   Maiolo, Luca ^a  

^a CNR   (Italy)

Author keywords

Flexible electronics; Laser annealing; Polycrystalline silicon; Thin film transistors

Indexed keywords

AM-OLED; CMOS TECHNOLOGY; DEVICE CHARACTERISTICS; DEVICE STABILITY; DISPLAY APPLICATION; DRIVING CIRCUITS; ELECTRICAL STABILITY; ELECTRONICS APPLICATIONS; FRONT END ELECTRONICS; GLASS SUBSTRATES; LASER ANNEALING; LOW TEMPERATURE POLYCRYSTALLINE SILICON; LTPS-TFT; POLYMER SUBSTRATE; POLYMERIC SUBSTRATE; POLYSILICON THIN-FILM TRANSISTORS; READOUT ELECTRONICS; THIN-FILM TRANSISTOR (TFTS); TRANSFER PROCESS; ULTRA-THIN;

CMOS INTEGRATED CIRCUITS; DISPLAY DEVICES; FABRICATION; FIELD EFFECT TRANSISTORS; FLEXIBLE ELECTRONICS; LIGHT EMITTING DIODES; POLYIMIDES; POLYMERS; POLYSILICON; THIN FILM TRANSISTORS; THIN FILMS;

SUBSTRATES;

EID: 84870053500     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2012.05.012     Document Type: Review

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