Low-temperature polysilicon thin film transistors on polyimide substrates for electronics on plastic

Solid-State Electronics

Volumn 52, Issue 3, 2008, Pages 348-352

  Pecora, A ^a   Maiolo, L ^a   Cuscuna M ^a   Simeone, D ^a   Minotti, A ^a   Mariucci, L ^a   Fortunato, G ^a  

^a IFN CNR   (Italy)

Author keywords

Laser annealing; Polycrystralline silicon; Polyimide; Thin film transistors

Indexed keywords

ANNEALING; HIGH TEMPERATURE OPERATIONS; LASER BEAM EFFECTS; POLYIMIDES; POLYSILICON;

DOPANT ACTIVATION; LASER ANNEALING; PLASTIC SHRINKAGE; PLASTIC SUBSTRATES;

THIN FILM TRANSISTORS;

EID: 38949207950     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.10.041     Document Type: Article

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