Fabricating thin-film transistors on plastic substrates using spin etching and device transfer

Journal of the Electrochemical Society

Volumn 152, Issue 3, 2005, Pages

  Wang, Shuo Cheng ^a   Yeh, Ching Fa ^a   Hsu, Chung Ti ^a   Lou, Jen Chung ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ACETIC ACID; ADHESIVES; CHEMICAL MECHANICAL POLISHING; CMOS INTEGRATED CIRCUITS; ELASTIC MODULI; ETCHING; MATHEMATICAL MODELS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASTICS; SILICA; SILICON WAFERS; STRESSES; SUBSTRATES;

DEVICE TRANSFER; EXTRINSIC STRESS; OPTICAL ADHESIVES; SPIN ETCHING;

THIN FILM TRANSISTORS;

EID: 15744382441     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1860491     Document Type: Article

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