Ultra-low temperature process by ion shower doping technique for poly-Si TFTs on Plastics

Journal of the Korean Physical Society

Volumn 48, Issue SUPPL. 1, 2006, Pages

  Kim, Jong Man ^a   Lim, Huck ^a   Kim, Do Young ^a   Jung, Ji Sim ^a   Kwon, Jang Yeon ^a   Noguchi, Takashi ^a,c   Hong, Wan Shick ^b  

^a Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^b University of Seoul   (South Korea)

^c Sungkyunkwan University   (South Korea)

Author keywords

Ion shower doping; Poly Si TFT

Indexed keywords

EID: 33644507084     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

References (12)

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