Surface-free technology by laser annealing (SUFTLA) and its application to poly-Si TFT-LCDs on plastic film with integrated drivers

IEEE Transactions on Electron Devices

Volumn 49, Issue 8, 2002, Pages 1353-1360

  Inoue, Satoshi ^a,b   Utsunomiya, Sumio ^b   Saeki, Takayuki ^b   Shimoda, Tatsuya ^b  

^a IEEE   (Japan)

^b SEIKO EPSON CORPORATION   (Japan)

Author keywords

Ablation; Annealing; Integrated drivers; Laser; Liquid crystal display (LCD); Plastic; Polycrystalline silicon thin film transistor (polysilicon TFT); Substrate; Thin film; Transfer

Indexed keywords

INTEGRATED DRIVERS; LASER ANNEALING; LASER IRRADIATION; POLYCRYSTALLINE SILICON THIN FILM TRANSISTOR; SURFACE FREE TECHNOLOGY;

ANNEALING; CHEMICAL VAPOR DEPOSITION; IRRADIATION; LASER ABLATION; LASER APPLICATIONS; LIQUID CRYSTAL DISPLAYS; LOW TEMPERATURE OPERATIONS; PERFORMANCE; PLASTIC FILMS; SEMICONDUCTING GLASS; SUBSTRATES; THIN FILM TRANSISTORS;

POLYSILICON;

EID: 0036683875     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2002.801294     Document Type: Article

References (20)

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