Large-grain polycrystalline silicon film by sequential lateral solidification on a plastic substrate

Thin Solid Films

Volumn 493, Issue 1-2, 2005, Pages 192-196

  Kim, Yong Hae ^a   Chung, Choong Heui ^a   Yun, Sun Jin ^a   Moon, Jaehyun ^a   Park, Dong Jin ^a   Kim, Dae Won ^a   Lim, Jung Wook ^a   Song, Yoon Ho ^a   Lee, Jin Ho ^a  

^a Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

Author keywords

Crystallization; Laser treatment; Polymer substrate; Silicon

Indexed keywords

CRYSTALLIZATION; LASER BEAM EFFECTS; SILICON; SOLIDIFICATION; SPUTTERING; THIN FILMS;

AMORPHOUS SILICON (A-SI); LASER TREATMENT; POLYMER SUBSTRATE; SPUTTERING POWERS;

POLYCRYSTALLINE MATERIALS;

EID: 27144436373     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.08.002     Document Type: Article

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