Sputtering technology of Si films for low-temperature poly-SiTFTs

Shapu Giho/Sharp Technical Journal

Volumn , Issue 80, 2001, Pages 36-42

  Voutsas, T ^a   Nishiki, H ^a   Atkinson, M ^a   Hartzell, J ^a   Nakata, Y ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EXCIMER LASERS; LIQUID CRYSTAL DISPLAYS; LOW TEMPERATURE EFFECTS; PHYSICAL VAPOR DEPOSITION; POLYSILICON; SPUTTERING;

FILM CONTAMINATION;

THIN FILM TRANSISTORS;

EID: 0035416931     PISSN: 02850362     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)